Used VEECO / DIGITAL INSTRUMENTS Dimension VX 330 #9381674 for sale

VEECO / DIGITAL INSTRUMENTS Dimension VX 330 is an atomic force microscopy (AFM) and scanning tunneling microscopy (STM) wafer testing and metrology equipment ideal for characterizing 3D surface topography of semiconductor wafers and devices. The VX 330 is suitable for a variety of applications including resistivity measurements, CMP inspection, resist and topography imaging, and defect analysis with scanning ion conductance microscopy (SICM). The system offers high-throughput pulse wide-field imaging and 3D topographical mapping of wafers and devices through its advanced optics and 5-axis motorized sample stage that provides stage resolutions up to 0.5nm and vertical range of travel from -5 to 5 micrometers. For enhanced precision imaging based on surface roughness, the VX 330 provides a patented spiral approach combined with high-speed X-Y scanning, which enables up to 17,000 images per hour with single scan recipes. The AFM mode of the VX 330 supports several probe types such as silicon scanning probes and scanning capacitance microscopy (SCM) probes. The multiscan mode features two different scan directions for faster acquisition of data and improved precision larger scans. The STM mode of the unit offers reliable tunnelling current topographic imaging of samples including films and thin layers down to about 3 atomic layers. This mode utilizes a piezo-driven z-feedback controller for accurate feedback and precise positioning of the scanning probe for high-resolution imaging. The probe control feature of the VX 330 is further enhanced by the Imaging Consistency feature that maintains optimal constants and adapts to probe behavior, measured sample capacitance and sample temperature to ensure reliable and accurate imaging. The topographical mapping of 3D features is also enhanced by the High Precision XY and Sub-Pixel laser profiling, which offers high-resolution scan imaging with an accuracy of up to 0.34 nanometers and a scan range of up to 3.5mm². The large color monitor and the Easy to Use software with intuitive icons help the user to control the VX 330 accurately and easily. The machine also allows automatic collection and storage of image-independent data with the Data Storage feature. Additionally, the powerful report writing feature in the tool helps in sharing results with colleagues or customers. All of these features combine to make the VX 330 an ideal wafer testing and metrology asset for semiconductor characterization and wafer defect analysis.