Used VEECO / DIGITAL INSTRUMENTS VX 200 #9063709 for sale
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ID: 9063709
Vintage: 2002
Atomic force profiler
Model #: DUVx200
Long scan profiles: Die length (up to 100mm)
Profile stage: up to 100mm
1μm X-Y axis repeatability
6μm vertical range
Superior step height repeatability: <5Å - 0.1μm and 1μm steps (1σ ); 20 traces at
20μm/sec scan speed
Unsurpassed lateral resolution: Low force, small tip radius (<10nm nominal)
True dishing and erosion analysis
OneScan Profiling: Zoom in on long scans without loss of resolution
High speed profiling: Up to 200μm/sec
Auto tip evaluation
Automatic exchange in ~4 minutes
24-tips per cassette
Dual cassette for different tip types
Throughput:
7wph (5 sites) for profiles
5wph (5 sites) for images
Profiler mode:
Data points/scan: 262,000
Imaging mode:
512 x 512 data points
Up to 65μm square area scans
Die scale imaging
3D visualization and analysis software
Optics:
Dual optics with 150μm and 600μm viewing area
Low magnification optics (3mm viewing area)
Capacity: 10 kA
220-25- VAC, 3.6 A
2002 vintage.
VEECO / DIGITAL INSTRUMENTS VX 200 is an advanced wafer testing and metrology equipment designed to enable manufacturers to perform accelerated life cycle testing and reliability evaluation of current and next-generation semiconductor devices. The system's high-end automation capabilities and optically-enabled metrology tool provide superior accuracy and reliability in process control and dimensional monitoring. VEECO VX 200 unit is designed to test up to three wafers at once, with wafer sizes ranging from 2 to 8 inches in diameter. In addition, the machine can handle wafer-thicknesses ranging from 200 to 500 microns or 1,500 to 2,500 microns. The tool includes a range of features, including a high-level automated test controller, support for high-throughput computer aided test (CAT) systems and an advanced wafer probe card. This combination of features enables rapid automated testing and measurement of process parameters and yields improved accuracy and repeatability in objective testing and characterization of device functionality. DIGITAL INSTRUMENTS VX 200's powerful optical subsystem is the asset's key asset, enabling the measurement and characterization of key characteristics such as particle size, defect density, chip-to-wafer alignment, and substrate thickness. This measurement and analysis enables device designers to optimize performance and reliability. The model's intuitive user interface provides easy access to advanced equipment control options, including built-in metrology capabilities, statistical software and process traceability tools. Additionally, it boasts a comprehensive suite of software applications, allowing users to easily access data, calibrate instruments and run tests. VX 200 system has been designed to withstand the rigors of highly demanding test and metrology applications. Its robust and reliable design enables it to be integrated into modern production environments. The unit is compatible with a wide range of testing and metrology systems, and its on-board diagnostics and alerts ensure a low rate of machine down-time. Overall, VEECO / DIGITAL INSTRUMENTS VX 200 is an advanced tool enabling manufacturers to perform rapid, accurate, and reliable wafer testing and metrology. Its combination of automation capabilities and powerful optical subsystems allow device designers to monitor and characterize key characteristics in order to improve performance and maximize device yield. The asset's robust and reliable design ensures it will be able to withstand the rigorous demands of modern manufacturing processes.
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