Used AKRION 9200 / 9200A #9105637 for sale

AKRION 9200 / 9200A
Manufacturer
AKRION
Model
9200 / 9200A
ID: 9105637
Wafer Size: 8"
Wet process system, 8".
AKRION 9200 / 9200A wet station is a precision, high-performance wet processing equipment designed to provide high-performance wet etching and cleaning solutions for production-ready semiconductor devices. The system utilizes state-of-the-art technology and robust process control software to achieve tight process control with high-precision results. The unit consists of several components, including a wet processing chamber, a substrate holder, and a solution-handling unit. The wet processing chamber is equipped with advanced, digitally-controlled thermal and flow control elements, ensuring uniformity of etch and clean results. Additionally, the controller is capable of storing up to thirty standardized recipes with which users are able to program in multiple parameters including solution temperature, cycle time, etch time, rinse time, and more. The substrate holder is responsible for holding the substrates in place during processing. It contains a removable frame so users can easily insert multiple substrates into the machine. In addition, the controller contains a variety of motion control features including rotation, forward/backward movement, and pulse duration. 9200 / 9200A wet station also features an advanced, automated solution-handling unit for accurate solution delivery and drying. This unit uses a set of pumps to deliver the etch and rinse solutions to the substrate holders, and a set of ultrasonic spray nozzles to precisely control the solution flow. The unit's sophisticated software ensures accurate real-time monitoring and analysis of the solutions as they are released into the chamber. The tool also features a laser-based thickness measurement asset with built-in signal analysis so users can precisely measure film thickness prior to processing. This feature enables users to optimize etching processes to achieve precise target thicknesses. Finally, AKRION 9200 / 9200A wet station also features integrated safety measures to help ensure safe operation. These measures include an opto-safety feature that guards against hands entering the chamber while it is open, as well as temperature and pressure sensors that alert users if any of these values are outside of their set parameters. In summary, 9200 / 9200A wet station is a high-performance, precision wet-processing model designed to provide users with consistent etching and cleaning solutions for production-ready semiconductor devices. The equipment features robust thermal and flow control, advanced motion control, automated solution handling unit, laser-based thickness measurement, and integrated safety features for efficient and safe operation.
There are no reviews yet