Used AKRION AWP #9141974 for sale
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ID: 9141974
Wafer Size: 8"
Vintage: 1997
Wet process system, 8"
Type : CP / H2O2
Install type : Stand-Alone
Process flow: L -> R
Cassette interface :
(2) Tec SEM integrated SMIF
(50) Wafer batch loading
Robot handler : Hauser
Module configuration :
Mod 1 (Process) : BSG
Chem : H2SO4/HF 16:1
Temp : 60°C
Material type : Quartz tank
Mod 2 (Rinse) : QDR (Cold)
Temp : Ambient
Material type : PVDF
Mod 3 (Clean) : Gripper clean (GC)
Material type : PVDF
Mod 4 (Process) : PHOS
Chem : H3PO4
Temp : 155°C
ER-OX : 40+/-8, PT-OX: 100
ER-SIN : 48+/-6, PT-SIN: 60
U%-OX: 20, U%-SIN: 5
Material type : Quartz tank
Mod 4 (Rinse) : QDR (Hot)
Temp : 50°C
Material type : PVDF
Mod 5 (Rinse) : Final rinse (FR)
Megasonic option
Material type : Quartz tank
Mod 6 (Dryer) : DMG
Marangoni IPA dry
Material type : PVDF
Mod 6 (Aux) : Auxiliary place
Mod 7 (Buffer) : PP
Mod 8 (Transfer) : Transfer station
Mod 8 (In/Out station) : In/Out
UI, CPU, Monitors
Fire extinguisher system (Control panel)
Chemicals:
H2SO4 (PFA material)
HF (PFA material)
H3PO4 (PFA material)
HCL (PFA material)
IPA (SS material)
Drains :
Main : PVC, 50A
Acid : PVC, 50A
Alkali : PVC, 50A
Industrial : PVC, 50A
Reclaim : PVC, 50A
Exhaust :
Acid : PVC, 100A (Flange)
Alkali : PVC, 100A (Flange)
Solvent : PVC, 100A (Flange)
Safety interlocks :
Leakage sensor
Temp
Over temp
Exhaust
Sniffer
Ultrasonic dry protect
Heat exchanger
Door sensors
Light barrier
Power requirements : 120/208VAC(12kVA), 60A, 3-Phase, 5-wire, Freq 60Hz
UPS back-up power : 120/208VAC (8kVA), 23A, 3-Phase, 5-wire, Freq 60Hz
1997 vintage.
AKRION AWP is a wet station designed to provide superior cleaning, conditioning, and preparation of substrates prior to printing. AWP uses an atomized spray impingement water equipment to deliver aqueous-based cleaning fluids onto the substrate, including both roll-based and web-based substrates. It is designed to provide both environmental compliance and excellent print quality and versatility. AKRION AWP system utilizes a multi-stage cycle for substrate wetting and cleaning, featuring a variable pressure nozzle and optimized flow characteristics for a consistent and uniform spray pattern. This ensures that all areas of the substrate are well covered with the cleaning fluid, and that excess over-spray is minimized. The nozzle is adjustable to cover a wide range of substrate widths and lengths, and can handle both web-based and roll-based substrates, including those with relief, texture, and pattern features. AWP uses a number of mechanical and chemical processes to ensure best results for substrate cleaning and conditioning. First, the substrate is pre-cleaned using a pressurized spray of de-ionized water and detergent. This is followed by a dynamic de-ionized water rinse. Finally, the substrate is conditioned with a UV light and a chemical mixture. This process ensures a clean and well-primed surface for the subsequent printing process. AKRION AWP includes a number of environmental features, such as an integrated wastewater management unit and Low-E® thermal insulation. This ensures that AWP is energy efficient, safe for the environment, and designed for low consumption of water and chemicals. Furthermore, it is certified UL, CE, and ROHS compliant. AKRION AWP offers a number of advanced features to make sure the entire pre-printing process is performed optimally. These include an integrated sensor machine, which ensures accurate process control, a continuous self-audit tool, and an auto-stop mode which pauses the asset when sprayed is not detected. Overall, AWP is a wet station that offers an impressive range of features and capabilities, making it an excellent way to clean, condition, and prepare substrates for printing. It is designed to provide superior performance and environmental compliance, and is a reliable and efficient choice for any pre-print application.
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