Used AKRION AWP #9141996 for sale
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ID: 9141996
Wafer Size: 8"
Vintage: 2001
Wet process system, 8"
Install type : Stand alone
Process flow : R -> L
Cassette interface :
(2) Tec SEM integrated SMIF
(50) Wafer batch loading
Robot handler : Parker
Module configuration :
Mod 1 (Process) : DSP
Chem : H2SO4/HF 13:1
Temp : 60°C
Material type : PVDF
Mod 2 (Rinse) : QDR (Cold) / CO2
Temp : Ambient
Material type : PVDF
Mod 2 (Clean) : Gripper clean (GC)
Material type : PVDF
Mod 3 (Auxiliary) : AUX
Mod 4 (Dryer) : DMG
Marangoni IPA dry
Material type : PVDF
Mod 5 (Buffer) : PP
Mod 6 (Transfer) : Transfer station
Mod 6 (In/Out station) : In/Out
UI, CPU, Monitors
Fire extinguisher system (Control panel)
Chemicals :
H2SO4 (PFA material)
HF (PFA material)
IPA (SS material)
Drains :
Main : PVC, 50A
Acid : PVC, 50A
Alkali : PVC, 50A
Industrial : PVC, 50A
Reclaim : PVC, 50A
Exhaust :
Acid : PVC, 100A (Flange)
Alkali : PVC, 100A (Flange)
Solvent : PVC, 100A (Flange)
Safety interlocks :
Leakage sensor
Temp
Over temp
Exhaust
Sniffer
Ultrasonic dry protect
Heat exchanger
Door sensors
Light barrier
Power requirements : 120/208VAC (8kVA), 22A, 3-Phase, 5-wire, Freq 60Hz
UPS back-up power : 120/208VAC (7.5kVA), 21A, 3-Phase, 5-wire, Freq 60Hz
2001 vintage.
AKRION AWP (Advanced Wet Processing) is a wet station designed for automated wafer production. It is capable of performing a variety of wet chemical processing tasks, such as wafer cleaning, surface treatment, etching, bonding, and lithography. AWP station contains all the components needed for automated wet processing, including a custom-designed wafer holder, a robotic arm, a weighing equipment, and a fluid management system. The wafer holder is designed to securely hold the wafers in place while processing, ensuring that they do not slip or become contaminated. The robotic arm uses precisely programmed movements to precisely place the wafer in the desired processing area of the station. It can also be programmed to precisely meter standard volume of liquid into the wafer. The weighing unit is an accurate and reactive digital scale, that uses complex algorithms to sense small changes in the weight of the wet wafer stack, expediting the loading and unloading of the station. The fluid management machine is integrated into the station to provide a steady and reliable flow of liquids to the wafers. It also consists of two microfluidic mixing modules, allowing for precise chemical dosing of materials. AKRION AWP station also features a number of safety controls to ensure operator safety, such as chemical resistance flooring, a built in alarm tool, a safety fence around the work area, and a ventilated hood to reduce the risk of exposure to hazardous liquids and vapors. Furthermore, AWP is designed with a water-resistant enclosure to prevent the entry of water or other contaminants into the working space. In conclusion, AKRION AWP is an advanced wet processing station that enables highly automated and efficient wafer production. Its robust and safe design, precise robotic arm and weighing asset, and excellent fluid management model make it an exceptionally reliable piece of equipment that can take on a wide variety of wet chemical processing tasks.
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