Used AKRION AWP #9141996 for sale

Manufacturer
AKRION
Model
AWP
ID: 9141996
Wafer Size: 8"
Vintage: 2001
Wet process system, 8" Install type : Stand alone Process flow : R -> L Cassette interface : (2) Tec SEM integrated SMIF (50) Wafer batch loading Robot handler : Parker Module configuration : Mod 1 (Process) : DSP ƒChem : H2SO4/HF 13:1 ƒTemp : 60°C ƒMaterial type : PVDF Mod 2 (Rinse) : QDR (Cold) / CO2 ƒTemp : Ambient ƒMaterial type : PVDF Mod 2 (Clean) : Gripper clean (GC) ƒMaterial type : PVDF Mod 3 (Auxiliary) : AUX Mod 4 (Dryer) : DMG ƒMarangoni IPA dry ƒMaterial type : PVDF Mod 5 (Buffer) : PP Mod 6 (Transfer) : Transfer station Mod 6 (In/Out station) : In/Out ƒUI, CPU, Monitors ƒFire extinguisher system (Control panel) Chemicals : H2SO4 (PFA material) HF (PFA material) IPA (SS material) Drains : Main : PVC, 50A Acid : PVC, 50A Alkali : PVC, 50A Industrial : PVC, 50A Reclaim : PVC, 50A Exhaust : Acid : PVC, 100A (Flange) Alkali : PVC, 100A (Flange) Solvent : PVC, 100A (Flange) Safety interlocks : Leakage sensor Temp Over temp Exhaust Sniffer Ultrasonic dry protect Heat exchanger Door sensors Light barrier Power requirements : 120/208VAC (8kVA), 22A, 3-Phase, 5-wire, Freq 60Hz UPS back-up power : 120/208VAC (7.5kVA), 21A, 3-Phase, 5-wire, Freq 60Hz 2001 vintage.
AKRION AWP (Advanced Wet Processing) is a wet station designed for automated wafer production. It is capable of performing a variety of wet chemical processing tasks, such as wafer cleaning, surface treatment, etching, bonding, and lithography. AWP station contains all the components needed for automated wet processing, including a custom-designed wafer holder, a robotic arm, a weighing equipment, and a fluid management system. The wafer holder is designed to securely hold the wafers in place while processing, ensuring that they do not slip or become contaminated. The robotic arm uses precisely programmed movements to precisely place the wafer in the desired processing area of the station. It can also be programmed to precisely meter standard volume of liquid into the wafer. The weighing unit is an accurate and reactive digital scale, that uses complex algorithms to sense small changes in the weight of the wet wafer stack, expediting the loading and unloading of the station. The fluid management machine is integrated into the station to provide a steady and reliable flow of liquids to the wafers. It also consists of two microfluidic mixing modules, allowing for precise chemical dosing of materials. AKRION AWP station also features a number of safety controls to ensure operator safety, such as chemical resistance flooring, a built in alarm tool, a safety fence around the work area, and a ventilated hood to reduce the risk of exposure to hazardous liquids and vapors. Furthermore, AWP is designed with a water-resistant enclosure to prevent the entry of water or other contaminants into the working space. In conclusion, AKRION AWP is an advanced wet processing station that enables highly automated and efficient wafer production. Its robust and safe design, precise robotic arm and weighing asset, and excellent fluid management model make it an exceptionally reliable piece of equipment that can take on a wide variety of wet chemical processing tasks.
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