Used AKRION GAMA #9047520 for sale

AKRION GAMA is a wet station designed for advanced semiconductor processing. This station brings together the best of advanced wet processing and chemical engineering to provide an innovative and reliable fabrication platform with unparalleled cycle time, throughput, quality, and yield. At its core, GAMA is a wet processing equipment that performs precise chemical processes on wafer substrates. Built on precision rack and pinion motion, AKRION GAMA system is capable of rapidly processing wafers at high levels of accuracy and repeatability. The unit is designed to process batches of up to eight wafers at a time on its 200 mm steel transfer pods. These transfer pods are designed to remain clean, dry and free of contamination as they move between the station's process modules. Each process module houses a single precision-motorized reagent jetting station that is designed to dispense the exact volume of reagent required for precise batch processing. The advanced reagent jetting station ensures consistent and repeatable dose control within a tolerant range of ± 10%. The station's vision machine provides breakthrough features for quality assurance and integrity checking. It can capture and store high-resolution images of chemical patterns and other wafer parameters for easy review and reference. The station is also equipped with a comprehensive material list that includes a wide variety of chemical reagents, gases, and other consumables. The material list can be tailored to meet specific process requirements, and the tool uses industry-standard robotics for material transport and delivery to the process modules. GAMA's interface enables user-friendly programmability and monitoring of all aspects of the asset including the reagents, chemical dosages, and parameters. The model allows users to program the station to run customized recipes or sequences of processes that utilize one or more of the equipment's process modules. Advanced programming options such as DoD or Randomly Varying patterns are available for maximum yield optimization. In summary, AKRION GAMA is an advanced wet station designed to overcome the challenges of high-volume semiconductor fabrication. With superior cycle time, throughput, quality, and yield, GAMA is a reliable and cost-effective solution for a number of fabrication applications.