Used AKRION GAMA #9210939 for sale
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AKRION GAMA is a wet station developed and designed by AKRION Systems. It is a self-contained, automated station used for high precision etching, cleaning, plating and deposition on a range of substrates. This wet station is ideal for microelectronic device processing, including MEMS and NEMS applications. It provides excellent etch uniformity and process repeatability for a variety of materials and substrates. GAMA wet station utilizes cutting-edge, durable technology, which is built to achieve excellent process control and performance. The station features advanced pumping and distribution systems that can be easily configured to meet customer's needs. The station also includes a closed-loop control equipment, which simplifies process control and monitoring. AKRION GAMA offers a wide range of process solutions. The station is fully configurable and can process different substrate materials, including silicon, dielectric, silicon nitride, copper and other metals. It is a modular station that can be integrated into a larger system. GAMA is designed with a sealed surface and exhaust, which make it a safe and environmentally friendly wet station. The process chemicals are stored in sealed containers, which are automatically dosed into the process chamber. This prevents any hazardous materials from entering the environment. AKRION GAMA is equipped with an ultra-high resolution optical unit that allows for precise inspection and alignment. Multiple process chemistry chambers are available for diverse applications. The station also includes a differential pump, which is used to precisely meter the fluids in order to achieve optimal process results. Additionally, the station's temperature control machine ensures consistent results during high-volume production runs. GAMA offers flexibility in process adaptation and optimization. An intuitive graphical user interface and recipe editor make the station easy to setup and program. The software is highly customizable and is capable of handling up to 50 distinct processes. The software also allows manual control over process parameters for optimal results. AKRION GAMA is a reliable and durable wet station with a proven track record for providing superior etching and cleaning performance. This wet station offers excellent process control and repeatability, ensuring excellent device yield and reliability. It is an ideal wet station for microelectronic device manufacturing applications.
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