Used AKRION UP-V2 HL 2000 #70444 for sale

Manufacturer
AKRION
Model
UP-V2 HL 2000
ID: 70444
Vintage: 2000
Wet bench etcher, 5" 4 tanks Set up to etch Chrome and gold with a surfactant tank 88” D x 73” W x 100” H 208V, 45A, 3 phase Cassette immersion etch Linear front rail robotic handler Never installed 2000 vintage.
AKRION UP-V2 HL 2000 is a high-precision wafer processing solution from AKRION designed to meet the needs of the semiconductor industry. It provides superior levels of performance in terms of precision, accuracy and repeatability in wet chemical etching processes for high-performance process nodes. UP-V2 HL 2000 wet station features a modular robotic platform, integrated wet chemical delivery, low-pressure chemical vapor deposition, high-capacity baking and feature alignment. The HL2000 features a state-of-the-art modular robotic platform, which is designed for flexibility, speed, and accuracy. This robotic platform allows the user to quickly reprogram the station for different tools, tasks, and process recipes. The low-pressure chemical vapor deposition system, allows the user to produce uniform thin films with a wide range of etch chemistry options. In addition, the station's integrated wet chemical delivery system provides precise and reliable delivery of etch chemicals directly to the substrate. AKRION UP-V2 HL 2000 also features a high-capacity baking system that is capable of accommodatingsubsizes up to 12-inch wafers and 400mm up to 700mm substrates respectively. Furthermore, the station comes equipped with feature alignment systems that can measure, align and store feature data accurately in as little as 3 seconds. This allows for high accuracy feature measurements and improved repeatability throughout the entire process. UP-V2 HL 2000 provides superior performance and repeatability for etching processes, even in complex process flows. It is designed to meet the needs of the most demanding processes, including high-aspect ratio etching, high-resolution anisotropic etching, and high-temperature etching. The HL2000 is an ideal solution for leading-edge semiconductor device production, allowing for superior performance and process control.
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