Used DNS / DAINIPPON FS-820L #293592680 for sale
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ID: 293592680
Wafer Size: 8"
Vintage: 1997
Wet station, 8
S/D
ONB1
ONB2
ONB3
CSB1 Chlorine
CSB2 H202
CSB3 HF
CSB4 HCL
CSB5 HF
Chemicals: H202, HCL, HF, Choline
Power cabinet
Aspirator
PRETECH PT-08M
DI Water heater
ULTAS PT Generator 06BSV
Dual megasonics
Robot loading
1997 vintage
DNS / DAINIPPON FS-820L wet bench station is a table-top cleanroom equipment for processing both small and large substrates. It provides high-quality process results for a variety of wafer-based applications, including electroplating, wet etching and photoresist strip. DNS FS-820L is ideal for laboratories, especially due to its manual or automatic pump selection. This wet bench station comes with an automated process control that includes a programmable safety system and a graphical user interface; this provides users the ability to easily monitor the process parameters. The main components of DAINIPPON FS-820L wet station are the main frame, a main tank, backside tank, overflow tank, waste tank, bronze mesh tray, and a number of optional tanks. The main tank, also known as the immersion tank, holds the parts and liquid during the processing. It is made of stainless steel and insulated to maintain a pre-determined temperature. The backside tank, also made of stainless steel, is used to hold the immersion tank and the overflow tank. Additionally, the bronze mesh tray helps keep the hydrostatically suspended parts level on the tank bottom and not move during the process. The overflow tank is designed to recover plating solution which passes the main tank, and then it is reused. The waste tank is used for the effective disposal of contaminated solutions and de-mixed plating solutions. FS-820L wet station also includes other auxiliary components, such as a DI water and recirculating pump, process controllers, and power bars, which are used to control the temperature, pressure, and flow-rate of the stator liquid. Additionally, DNS / DAINIPPON FS-820L is equipped with a pneumatically operated membrane transfer station. This station is used to ensure each part is securely processed and precisely positioned during the wet process. The flushing unit is also integrated with this station, allowing control over the contamination level of the stator liquid. DNS FS-820L wet bench has been designed with a modular architecture. This allows components to be added based on the user's needs and budget. The station is also designed to provide compatibility with a variety of stators and takes into account user safety. The advanced water filtration machine helps to reduce contaminants and the in-built DI water makes the process faster and more efficient. DAINIPPON FS-820L is an energy-efficient wet station that offers a complete, automated solution to meet the needs of a wide range of wafer processing applications.
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