Used DNS / DAINIPPON FS-820L #293597789 for sale
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ID: 293597789
Wafer Size: 8"
Vintage: 1997
Wet station, 8"
A / Box
Main body
Front loader
S/D
ONB1
PCVB1
PCB1
PCB2
CSB1
H202
SUB-CSB
H2S04/H202
Power cabinet
Aspirator
PRETECH PT-08M Finesonic generator
DI Water heater
ULTAS PT Generator 06BSV
Robot loading
Dyal megasonic bath
1997 vintage.
DNS / DAINIPPON FS-820L is a wet station for semiconductor device manufacturing that provides precise cleaning and rinsing. This wet station is suitable for both solo and batch production. DNS FS-820L offers precise washing for its wide range of materials including silicon wafers, tape, films, and glass. It is equipped with eight tanks, enabling simultaneous handling of various cleaning steps in one station. DAINIPPON FS-820L is designed to be user-friendly with features including easy-to-operate control panel, continuously adjustable tank temperature, and real-time data monitoring. It is equipped with a cleaning monitor equipment that supports automated operation and precise control of the cleaning process. The monitor system can be used to check whether cleaning operation is effectively completed or not. FS-820L uses flow rate control and concentration control systems which can ensure a consistent finish by optimizing the dilution of cleaning solutions. It also has a water usage monitoring unit, which allows users to minimize water usage by setting an appropriate water flow rate for each process. The rinse time of DNS / DAINIPPON FS-820L is adjustable from 0.5 to 99 seconds. It also offers a wide range of temperature settings from ambient to 99℃, to meet all the needs of process control. In order to prevent the mix-up of materials, all of the tanks have an Easy Identification Machine (EIS) installed. This tool allows each tank to be pre-assigned with a Tank ID for easy identification. DNS FS-820L also provides a powerful air and fluid valve control asset which supports precise dosing of fluids, aeration, and removal of bubbles. It also includes a platform monitor that records the position of the processing object in the station, real-time and also records temperature, flow rate, and dilution. To ensure safety, DAINIPPON FS-820L is equipped with an advanced monitoring model that ensures cleanliness and stability of the equipment. It also includes an acid countermeasure which includes an automatic pH adjustment system, an acid-nester, and a de-aeration unit, so user safety is guaranteed. In conclusion, FS-820L is a semiconductor device manufacturing wet station with useful features such as Easy Identification Machine, flow rate control, concentration control, and powerful air and fluid control. Its adjustable tank temperature and timeout settings make it suitable for both solo and batch production. Its advanced monitoring tool ensures safety and cleanliness, making it ideal for semiconductor device manufacturing.
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