Used DNS / DAINIPPON FS-820L #9026293 for sale
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ID: 9026293
Wafer Size: 8"
Vintage: 1996
Wet station, 8"
S/D
ONB1
PCB1
PCB2
CSB1
Chlorine
CSB2 H2SO4
CSB3 H2O2
CSB4 H3PO4
Dual megasonic baths
SDR
1996 vintage.
DNS / DAINIPPON FS-820L wet station is an advanced wet processing machine specially designed for the semiconductor industry. It is capable of handling both wafer-level and chip-level processes, allowing for increased process flexibility and throughput. The main feature of DNS FS-820L is its advanced hydro-splitting technology. This technology enables users to achieve a high level of process repeatability and low levels of wafer warp and particle contamination. It also features process-on-demand capability, allowing for fast and accurate process runs. The core of DAINIPPON FS-820L is its Splitting Module with five stages of cleaning, drying and IPA rinsing, which is tailored for each individual process. The Splitting Module enables the highest level of cleaning, drying, and IPA rinsing performance, ensuring a perfect end-product. Additionally, the GlaCeraTM solution keeps pure water at a stable, ultra-low temperature to prevent leaks and ensure cleanliness. FS-820L also includes a Loading Arm Module with three stages of process, which can further customize a process to specific needs. This module helps automate processes such as load port, end effector, and flat-battery removal/installation. The wet station also provides a host of other features, such as an enhanced User Interface with LCD and customizable buttons for streamlined process setup; and an intuitive software package for control, data collection and process traceability. Overall, DNS / DAINIPPON FS-820L is an efficient and reliable wet processing system that provides a wide range of process options. It is designed to maximize process efficiency, minimize wafer warp, and ensure optimal particle contamination levels. With its advanced features, flexible process capabilities, and intuitive design, DNS FS-820L is an ideal tool for the semiconductor industry.
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