Used DNS / DAINIPPON SU-3000 #293591332 for sale
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ID: 293591332
Wafer Size: 12"
Vintage: 2010
Wafer cleaner, 12"
Single wafer processing
Wet process: HF Clean
Processing unit:
Backside nozzle
(3) Fixed nozzles with holder
Splash guard
Scan nozzle home drain port
Separation box
Fluid box trap tank
Controllers:
TOSHIBA Industrial computer
Indexer robot controller
Chemical cabinet controller
YASUKAWA Servo pack
KOMATSU Thermal controller
Mass Flow Controller (MFC)
Load port controller
Solenoid controller
Drive mechanisms:
YASUKAWA Indexer robot
(3) Load ports
FOUP Mapper
YASUKAWA Center robot
Chamber shutter door
(2) Reversers
Spin base (3 Movable pins)
Shield plate
MPC Scan nozzle 1 type 3 arm
MPC Scan nozzle 2 arm
Chuck position sensor
Wafer presence
Fluid system:
(4) CSBs, 5 L
(2) Mixing tanks, 60 L
Reclaiming tanks
(3) Thermal circulators
(4) Bellow pumps
(4) Pumps
(4) Chemical circulation filters
(2) HORIBA Concentration monitors
Ultrasonic flowmeters
(2) Chemical cabinet drain trap tanks
(4) UPW Filters
E-Flow units
Resistivity meters
(4) SMC Pumps
Rotameters
Mechanical oil gauges
Digital gauge
Tank level sensors
CS Heater
EMO
Leakage sensors
Cover interlock sensors
Tower lamps
Flashing lamps
Gas system:
N2 Filters
Speed controllers
Exhaust system:
Exhaust switching boxes
FFU
Exhaust gauge
FFU Gauge
MPC 1, 2, 3 and 4:
100:1 HF, 300:1 HF, NH4OH 0.5wt%, H2O2 1wt%, CO2 Water, HPN2
Description / Power rating
AC Power cabinet with UPS / 208 V, 3 Phase
HF Chemical cabinet / 208 V, 3 Phase (49% HF)
SC1 Chemical cabinet / 208 V, 3 Phase (28% NH4OH, 30% H2O2)
LUFRAN Heater / 480 V, 3 Phase
UPS / 60 V
Does not include Hard Disk Drive (HDD)
2010 vintage.
DNS / DAINIPPON SU-3000 is a wet station that is designed to provide very efficient chemical processing. It is useful for many chemical processes and is capable of working with both liquid and solid chemicals to produce desired results. The unit is made from high-grade stainless steel and features an adjustable temperature range that allows for precise and effective chemical processing. It is also equipped with an air cooled motor for optimal expediency and has an adjustable flow rate for further control. DNS SU-3000 also features an efficient 3D multi-use centrifuge equipment, which allows it to process a wide variety of chemical samples and produce a variety of end products including emulsions, creams, ointments, suspensions, and other products. The unit can handle a wide range of input materials, including pure chemicals, raw materials, intermediate products, and final products. The machine has safety features, including a built-in protective layer to prevent corrosion of components. Additionally, the unit is designed with a variety of safety shut-off measures as well as a built-in alarm system. DAINIPPON SU 3000 is designed with a simple yet reliable user interface, allowing operators to easily monitor their work and adjust parameters quickly and accurately. This machine also features an easy-loading unit that allows for easy management of input materials and processes. Additionally, the unit offers multiple points of access for various control systems, making it very reliable and extendible. DAINIPPON SU-3000 is capable of performing sophisticated chemical processes and producing desired end products, making it a great tool for chemical processing. This wet station is ideal for producing high-quality, consistent results in a wide range of chemical processes, from mixing, blending, and homogenizing to separating, distilling, and filtration. Furthermore, the unit's robust construction, safety features, and comprehensive control machine makes it a great choice for many chemical processing applications.
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