Used DNS / DAINIPPON SU-3100 #293615278 for sale
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ID: 293615278
Wafer Size: 12"
Vintage: 2012
Wet station, 12"
PR Strip process (DECAP)
PC
(8) Chambers
Chemical: SC-1, SPM
Temperature (SPM / SC-1): 50°C-150°C / 30°C-120°C
Handler
(4) Load ports
Chemical units: H2SO4, H2O2, NH4OH, DHF
Overhead Transport System (OHT)
YASUKAWA ELECTRIC CORPORATION XU-ACT153L-H01 ID/R
CAMBRIDGE Filter GA5-445480E-SWLER FFU
Capacity: 99.9999 <% or more of 0.1 µm particle
Test (m³/min): 5.6 at 120 pa
Range of air control: 0.4 m/sec
Shield plate
Spin base:
Material: PCTFE
Spin motor: AC Servo motor
Revolution: Maximum 3000 rpm
Revolution accuracy: ±3 rpm
Chuck:
Drive: Pulse motor
Material: PCTFE, ETFE
Wafer detection: Detection by chuck pins
Shield plate:
Material: HT-PVC
Revolution drive: AC Servo motor
Revolution: Maximum 3000 rpm
Acceleration: Maximum 1000 rpm/sec
Revolution accuracy: ±3 rpm
Shift: AC Servo motor
Wafer surface distance : Minimum 0.3 mm
Splash guard:
Structure: Chemical collection
Material: PTFE
Shift: AC Servo motor
Sputter:
Drive: Air cylinder
Chemical cabinet-1,2: Temperature control of low temperature
Chemical used: SPM, SC-1
Mixing ratio: Premix
SPM: 50-150°C
SC-1: 30-120°C
Circulation pump: PILLAR
In-line heater
E-Flow:
SD16L-24SHR E Module
HORIBA HE-480-DC Resistivity meter
ESD-001C-T Resistivity sensor
CK-10M Sensor cable
EFA-30 Sensor holder
MY2N-CR DC 24 V Relay
Chemical cabinets:
CC1-SPM
CC2-SC-1
E-Flow
(4) Cooling tanks
Power rack
Missing parts:
I/O Board
H/D
2012 vintage.
DNS / DAINIPPON SU-3100 wet station is a laboratory-grade appliance used to create a controlled environment for preparing specimens. The unit takes a high-volume of liquid, such as water, and can be used in a variety of applications, including high-tech manufacturing, food processing, and biological testing. DNS SU-3100 is designed to provide a precise and adjustable balance between air delivery and suction, creating a stable and uniform temperature range for accurate results in experiments. The wet station employs two water baths, divided into distinct sections that utilize an internal integration process to evenly circulate the liquid. The combination of these two baths creates a controlled environment that is adjustable from 2 to 15 degrees Celsius. DAINIPPON SU 3100's built-in water circulating system is designed to provide the user with accurate observation of specimen growth and to maintain a steady temperature of their choosing. The user simply adjusts the air delivery to maintain the exact temperature for the specimens. The integrated control panel makes it easy to monitor water temperature, set parameters, and receive reports as needed. The user can also adjust the air delivery settings to manipulate the room air temperature surrounding the test chamber. The wet station also plays a critical role in quality control because it maintains a wet environment conducive to ensuring the accuracy and safety of products. All of the components are made of corrosion-resistant materials that can withstand long-term exposure to water. DAINIPPON SU-3100 features a comprehensive control system which includes a user-friendly, adjustable control panel and a simple-to-read backlit LCD display. The unit is compatible with the majority of liquid types and can be used with a variety of specimens. In conclusion, DNS / DAINIPPON SU 3100 wet station provides a precise and adjustable balance between air delivery and suction for creating a controlled environment for preparing specimens. It makes it easy to maintain a wet or dry temperature depending on the user's requirements. The unit is ideal for a variety of industries and is designed for long-term use.
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