Used DNS / DAINIPPON SU-3200 #293591976 for sale

DNS / DAINIPPON SU-3200 wet station is an advanced vacuum wafer processing equipment designed with reliability and performance in mind. It is suitable for a wide range of wet processes, such as resist coating, developing, rinsing, etching, and cleaning. Built with a powerful automated loading system, this wet station eliminates the need for manual handling of substrates and offers an accurate and repeatable application process. At the heart of this unit is DNS belt-drive motor and motion control servo machine. This allows for precise and repeatable motion of the loading and processing components. The wafer transport arm features a bi-directional motorized span and elevation, providing a high-throughput, adjustable range of motion. The linear and rotary actuators provide controlled, repeatable motion with a range of speeds. The tool includes a four stage process chamber featuring a multi-position spin-tilt process module. This chamber offers three individual reservoirs for multiple process solutions andfeatures a cover gas isolation valve for optimal control of the process gasses as well as efficient removal of process fumes. In addition, a set of adjustable air knives provide cross-flow drying to reduce spin-dry time and improve wafer throughput. For improved safety, DNS SU-3200 wet station features a high-speed optical detector to monitor wafer handling and detect the presence of any debris on the conveyor. The asset also includes an auto-load monitoring and process control model that monitors process parameters, such as temperature, spin speed, and chamber pressure. In addition, a resist monitoring equipment and a remote control panel provide the operator with real-time control of the system. DAINIPPON SU 3200 wet station is an advanced vacuum wafer processing unit designed to provide reliable and repeatable performance. With its powerful motor and motion control, automated loading machine, and process monitoring tool, this asset offers an efficient and safe solution for a wide range of wet processes.