Used DNS / DAINIPPON SU-3200 #293596498 for sale
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ID: 293596498
Wafer Size: 12"
Vintage: 2012
Wafer cleaning system, 12"
(12) Chambers
(2) Ozone
CIM: SECS / GEMS
Process: SOM / SPM / SC1 / SC2 / O3W / DHF
KAWASAKI Handler
Factory interface: (4) FOUP
2012 vintage.
DNS / DAINIPPON SU-3200 is a wet processing station designed to perform a variety of wet processing steps including electroplating, photolithography, etching and preparation steps. The station's primary components include an immersion tank, a compaction vessel, a vacuum tank, an anode compartment and an etching chamber. This station is suitable for performing multiple applications in a single processing setup. The immersion tank on DNS SU-3200 is characterized for its continuous feed capability and controlled agitation. The tank is designed for rapid dissolution, activation and cleaning of parts. It features adjustable speed stirrers and has a temperature range of 20-60°C. It also includes a heated overflowing tank that keeps the electrolyte level above the product level. The compaction vessel is used to hold the product while it is being worked on. It is designed to apply pressure to the product during electroplating and also acts as a reservoir for the electrolyte solution. It has adjustable height skirts and a temperature control range of 40-60°C. The vacuum tank is used to create a vacuum within the tank. This is important when performing photolithography, as the vacuum helps to ensure uniform film coating. The tank is equipped with an evacuation hole, inlet and outlet ports, and has a temperature range of 40-60°C. The anode compartment is the chamber where the parts are plated. It contains a heating element to increase the temperature and an adjustable baffler to optimize the current density. It features electrical connections for a computer controlled plating process. Finally, the etching chamber is used for wet etching. It is equipped with a large opening where the solution is transferred, as well as independent temperature control and vacuum control. The chamber has adjustable baffles that help to control the current density. Overall, DAINIPPON SU 3200 is a reliable wet station for performing a variety of wet processing applications. The multiple tanks and chambers make it a versatile wet station for carrying out multiple applications. Its adjustable temperature control and stirring capabilities help to ensure high-precision results.
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