Used DNS / DAINIPPON SU-3200 #293617642 for sale
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ID: 293617642
Wafer Size: 12"
Vintage: 2014
Wafer cleaning system, 12"
Process : Spray clean
Chemical: SC1 / DHF / H2SO4 / O3
(12) Chambers
Factory interface: (4) FOUP
KAWASAKI High speeds IR / CR handler
2014 vintage.
DNS / DAINIPPON SU-3200 wet station is a highly advanced piece of wet processing equipment developed by DNS to deliver higher precision processing performance. It is a wet station used for various wet processing operations such as etching, cleaning, coating, and drying. DNS SU-3200 features a wide range of highly advanced wet processing modules that offer advanced processing capabilities, including a semiconductor-grade etching tank, double-chamber CPT coating equipment, advanced cleaning & drying components, and a photoresist develop/strip system. It is compliant with the International Electrotechnical Commission (IEC) requirements, achieving better accuracy and repeatability in production output. DAINIPPON SU 3200 is a highly automated wet station that automates many of wet processing conditions to ensure consistent quality outcomes. For example, the etching unit includes a variety of intelligent parameters that allow setting different etching solutions based on the requirements of each project. Additionally, the device incorporates a tool monitor machine to continuously monitor and display such data as line/load variations and humidity. DNS SU 3200 is equipped with a water purification and recirculation tool that can control the etching temperature, ensuring contamination-free solutions. It is also designed for safety with safety interlocks and alarms, offering protection against chemical porosity and splashing. Moreover, it allows for independent wet processing and drying conditions for more efficient processing. SU 3200 is compact in size, offering flexibility in installation and operation, and features an easy-to-operate user interface, enabling seamless operation of wet processes. Other features include a traceability asset, customizable output data format, and remote diagnostics. SU-3200 wet station is an ideal solution for semiconductor wet processing applications where precision, accuracy, safety and repeatability are essential. It offers a comprehensive array of capabilities and a high level of automation, enabling users to meet their production needs quickly and efficiently with highly reliable and repeatable results.
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