Used DNS / DAINIPPON WS-820C #9152514 for sale
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ID: 9152514
Vintage: 1995
Wet station
Load
CHCL Shower N2 blow
DHF
Q Etch
EDR
IPA Dryer
Unload
1995 vintage.
DNS / DAINIPPON WS-820C wet station is an essential piece of wet bench equipment required for the completion of high quality wafer processing. It is a fully automated, single or dual station, precision controlled wet processing equipment engineered with the aim of achieving maximum efficiency, minimum operator interaction and repeatable, highly accurate results. The hardware configuration includes an alloy stepper, double sided motorized platforms, two manifold and wet process tanks, a back side deionized (DI) rinse tank and an integrated conveying system for handling multiple wafers per process cycle. The unit is engineered to deliver superior temperature and chemical solutions stability, as well as excellent machine control. It features programmable wafer indexing and nested wafer handling, with synchronous low flow and high pressure operation, a positioner for both wafer and carrier handling, inkjet wafer identification and a fully digital tool for controlling data, including manual and automatic modes, fault detection, and recovery capability. The double-sided platform, featuring an integrated conveyors for multiple wafers processing, works together with large process and rinse tanks, providing linear movement capabilities, allowing high precision motion and repeatability control. In addition, the asset includes a DI tank, utilizing the wafer's backside pressure to prevent the wafer from adhering to the tank's surface, and also allowing for manual operations. The integrated on-board computer provides full control of the model with process recipes, enabling full traceability and better control over the process parameters, as well as fault detection, emergency stop, flow and pressure monitoring and recovery capability. The mis-event prevention and tracking systems also feature full validation capabilities. DNS WS-820C is fully compatible with the world's most popular software suites such STATS, CALC, and MPS, etc., and provides enablement for recipe preparation and implementation. The full recipe library for both manual and automatic operation provides opportunities for reproducible results time after time. The wet station is available in three different models DAINIPPON WS820C, WS-820CR and WS-820W - which also feature a number of configurations and accessor-ies tailored for specific applications and demands. DNS / DAINIPPON WS820C model is designed for wafer cleaning specifically, while the RJSTX-200 stand is ideal for wafer exposure processes. The WS-820W package includes an integrated wafer chucking equipment, gas cabinet, auxilliary controller, and a variety of pneumatic control units.
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