Used LAM RESEARCH DV-38DS #9095950 for sale

LAM RESEARCH DV-38DS is a wet processing station designed for semiconductor device fabrication. It is capable of multi-step processes such as developing, etching, patterning, and cleaning procedures for a wide variety of device substrates. The station consists of a main unit, a turret, and several different process modules. The main unit of the station is a large aluminum housing that houses the electrical components, pumps, and process fluids. The turret is a single rotating head on the top of the station which holds up to eight wafer cassettes for multi-step processing. The different process modules include a wet-etch module, a spin-rinse module, and a drying module. The wet-etch module contains an etch tank - a large chamber that houses the etchant and delivers it to the wafers. This etchant can be a single-component (e.g. nitric acid, sulfuric acid, or hydrochloric acid) or a multi-component (e.g. HF-IPA) solution; and the chamber is continuously flushed with fresh chemicals to keep the etching environment clean and prevent contaminant buildup. The spin-rinse module contains the rinse tanks - two large tanks that contain process fluids and supply clean rinse water to the wafers. This clean rinse water is needed to remove residue from the etch process, and can be either DI water or an in situ flush solution for better cleaning. Finally, the station also contains a drying module, which uses hot air or nitrogen to quickly dry the wafers before they are unload. This is important because any residual etchant or rinse fluid can be corrosive and cause the device to malfunction. DV-38DS is a highly reliable wet processing station that facilitates the fabrication of high-quality semiconductor devices. It is designed to provide precise control over individual process steps, and its modular process modules make it easy to customize for different applications. Furthermore, the station is compatible with the LAM LEVEL-1 recipe language, allowing for precise control over the programming of processing recipes. Overall, LAM RESEARCH DV-38DS is an excellent wet station for any semiconductor fabrication laboratory.