Used LAM RESEARCH DV-38DS #9095951 for sale

LAM RESEARCH DV-38DS is a wet station which combines high-capacity chemical delivery and dispense, as well as a vacuum chuck for wet processes. This high-end equipment is designed to simplify and streamline the wet process needs of leading semiconductor manufacturers. The integral cassettes contains an integrated chemical delivery system which allows the user to deliver the specified amount of chemicals and effluents directly to the process chamber for wet etch and deposition applications. The intuitive user interface gives the operators the ability to control the flow and delivery of chemicals to the process chamber. This allows users to achieve optimal performance in wet etching and deposition processes. DV-38DS is equipped with a robust, vacuum air-lock chuck. This feature enables the user to process wafers in a vacuum environment, while still having access to the vacuum chamber. This allows for superior control of processing parameters which leads to higher yields and improved process performance. Additionally, the chuck allows for the rapid reloading of wafers without compromising on the integrity of the chamber environment. The air-lock between the main vacuum chamber and the processing chamber allows users to easily move wafers between the two. LAM RESEARCH DV-38DS additionally features a low-cost and easy-to-use temperature control unit. This feature allows users to easily manage temperature in the chamber, ensuring optimum performance in every process. Additionally, the machine supports low static gas pressure in the chamber, reducing the need for additional maintenance or additional equipment for gas supply. Overall, DV-38DS is a highly versatile wet station that combines all of the features required for advanced wafer processing in a single tool. It offers a wide range of capabilities, from chemical delivery to temperature and vacuum control, while still being easy to use and cost-effective. The asset is designed to meet the needs of leading semiconductor manufacturers, allowing them to maximize performance and guarantee high yields.