Used MODUTEK QA14-DA1 #9081711 for sale

MODUTEK QA14-DA1, manufactured by MODUTEK Corporation, is a wet processing station made for use in a wide variety of advanced, semiconductor production processes. QA14-DA1 is capable of handling substrates between 200mm and 300mm in size, and offers a total process area of 10,240 square inches. Other features include a process chamber with a depth of 18 inches, a load port that accommodates up to six cassettes, a gas box for regulated gas distribution, and a long-life membrane transfer unit. The station's sealed stainless steel design ensures maximum efficiency during production processes. It also allows for a range of automated processes to be performed such as chemical formulations, resist strip, etching, cleaning, and drying. This make the wet station suitable for applications in wafer fabrication, photomask fabrication, and other high-tech industries. The station is equipped with a powerful single-phase pump system that makes use of a mix of centrifugal and positive displacement pumps. This flexible system is capable of transferring chemicals, liquids and other materials at any of four flow rates - 10, 20, 30, and 40 liters per minute. The system also offers several additional capabilities, such as air agitation, air sump bubbling, and hydro-pulse operation. The station has been designed to provide stringent waste management and user-friendliness. It supports a range of waste-handling capabilities, such as the use of common waste tanks, the ability to manage multiple types of waste, and a continuous feedback regarding the volume of waste. This makes it suitable for use in high-volume wafer fabrication environments where strict waste management protocols must be followed. The wet station also facilitates fast, user-friendly operation. The user interface offers customizable recipes, automatic vital-parameters monitoring, and detailed maintenance records. Furthermore, its modular design allows for easy service and maintenance. Overall, MODUTEK QA14-DA1 offers powerful features and a versatile performance that make it suitable for use in a range of advanced semiconductor processes.