Used SES PEGASUS #168066 for sale
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ID: 168066
Wafer Size: 8"
Vintage: 1997
Wet station, 8"
(5) Chemical baths
Process: Solvent Strip Station
(2) KOMATSU Hot DIW heater units
Bath configuration:
1 / CC
2 / BOE
3 / EDR
4 / H3PO4
5 / H3PO4
6 / H3PO4
7 / HQDR
8 / SC-1
9 / HQDR
10 / FR
11 / IP DRYER
Includes:
LD Module
BOE Module
HP Module
SC-1 Module
FR, Dryer module
LD Front conveyor
ULD Front conveyor
Vapor dryer (IPA)
Sonic generator, SC-1 con unit
Rear monitor rack (maintenance PC) and operation manual
(5) Boxes with parts
IPA Scrubber
(5) Back conveyors
LD Electric box
HP Heater electric box (in-line heater)
Main electric box
ULD electric box
Computer rack
(2) KOMATSU Hot DI units
(2) Pipe ducts
HP (H3PO4) Pump (HP circulation unit)
(5) Boxes of parts:
Drain tank
H3PO4 Circulation duct
H3PO4 Circulation duct
H3PO4 Bath, dryer cover, F/R wafer guider
F/R Bath
HQDR Bath
IPA Dryer bath
H3PO4 Temp, SC-1 temp cover, ARM chuck, HQDR wafer guider, HQDR bubbler
(3) H3PO4 Baths, HQD bubbler, HQDR wafer guider
QDR Bath
SC-1 Bath, SC-1 wafer guider
H3PO4 (1, 2, 3) Bath cover, SC-1 bath cover
(2) HQDR Baths, (2) ARM chucks, dryer cover
(2) H3PO4 Baths, (3) ARM chucks, F/R plate
QDR Wafer guider, H3PO4 (1, 2, 3) wafer guider
Operation manual
1997 vintage.
SES PEGASUS is a wet station designed to monitor and maintain sea surface buoyancy and temperature during long-term ocean studies. It is capable of collecting data to improve our understanding of ocean currents and the effects of climate change. The station consists of a steel frame, connected to two buoyancy chambers that can be filled with seawater to anchor the station. Additionally, the station includes an array of instruments to measure various parameters such as barometric pressure, humidity, wind speed/direction and sea surface temperature. A series of pumps and valves can be connected for wave data collection and wave energy conversion. The station is also equipped with a variety of sensors to measure temperature, salinity, oxygen, pH, fluorescence and turbidity. These data are invaluable in understanding the oceanographic conditions around the wet station location. These measurements allow the station to make real-time decisions and optimizations on behalf of the oceanographic studies it is monitoring. PEGASUS is constructed with corrosion resistant materials and rigid structural integrity to ensure that it can withstand harsh sea conditions and regularly maintain instrumentation integrity. The station is designed in such a way that it can maintain its buoyancy when disconnected from its power supply, to ensure its safety and integrity during hurricane-strength storms. SES PEGASUS can be connected to an onshore power source for short-term operations, allowing for timely data retrieval and station maintenance. This is especially important since the station can transmit the sensor data in real-time and the collected data can be more effectively analyzed and decisions can be made more quickly. This further enhances the accuracy of the data collection and the utility of the station. The station is also equipped with an environmental handling system (EHS) to reduce pollutants that could otherwise reach the environment. This system allows PEGASUS to minimize the impact of the station on the environment while providing the necessary data collection and instruments. In summary, SES PEGASUS is a robust and reliable wet station that is capable of collecting a variety of oceanic data, with features such as corrosion resistance, structural integrity, energy storage, and EHS management. The station can provide benefits to a variety of research studies, allowing for better understanding of the ocean and climate change.
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