Used TEL / TOKYO ELECTRON Expedius #9131184 for sale

TEL / TOKYO ELECTRON Expedius is a wet station used for fabrication of products. It is a multi-functional equipment which is designed to enable high-precision and efficient fabrication and process control. It incorporates Electronic Control (EC) technology and a wide variety of plasma sources, all of which enable high-precision and efficient process control. TEL Expedius wet station is used for various applications across the semiconductor process across both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing. It can accommodate various processes such as wafer cleaning, wet etching, chemical-mechanical polishing (CMP), and Electro Chemical Deposition (ECD). The EC technology enables uniformity of process conditions over a larger area. This is achieved by providing a wide range of current density settings which can be changed depending on type of application. The wafer can be exposed to various plasma sources which allow for deposition or etch rates to be optimized to achieve peak process performance. Additionally, it has safety features which help prevent contamination of parts due to exposure to hazardous chemicals. On the control side, TOKYO ELECTRON Expedius system has been designed to provide ease of use. Its intuitive operating unit allows operators to quickly and easily set up and control process conditions. It provides parameters for controlling temperature, current, and voltage with great accuracy. It also features durable human-machine-interfaces which are backed by reliable algorithms and enable efficient operation. Expedius has a small footprint which makes it perfect for installation in cleanroom environments. Furthermore, its robust design enables continuous operation even in the presence of corrosive chemicals. It also offers precise process control for a wide range of applications. For example, the same machine can be used for deposition or etching of different materials, such as oxide, poly-silicon, and metals. All in all, TEL / TOKYO ELECTRON Expedius is a high-performance, efficient wet station specifically designed for various process applications. Its highly precise EC technology and plasma sources provide great process control, while its user-friendly interface enables simple and efficient operation. It is a reliable solution even in the presence of corrosive chemicals, making it perfect for integration in cleanroom environments.