Used TEL / TOKYO ELECTRON Expedius #293586639 for sale

TEL / TOKYO ELECTRON Expedius is a modular wet station designed for semiconductor chip manufacturers that offers a variety of features for effective wafer handling. It is designed for easy operation, maintenance and technical support with several safety features. The equipment consists of a transfer module, mainframe, environmental chamber and substrate heating module. The transfer module is the main component of the system and is used to transfer wafers between the environmental chamber and the mainframe. It includes an automatic wafer alignment and leveling mechanism, a vision unit, a vacuum chuck and a high resolution camera. The transfer module has an integrated vision machine that allows users to align and detect any defects in the wafers. The camera used in the vision tool can differentiate between dark and bright areas on the wafer and detect any mechanical defects. The vacuum chuck is used to securely hold wafers in place and the alignment mechanism allows users to accurately adjust the wafer position. The mainframe of TEL Expedius has several components that allow for precise control of process tools. These components include a vision asset, a liquid delivery model, a dielectric delivery equipment, a controller board and a waver assembly. The vision system is used to precisely control the process tools. It is able to detect any process irregularities or anomalies and provide real-time feedback to the controllers. The liquid delivery unit is responsible for the uniform deposition of liquid during wet processes. It is also used to supply and store different types of liquids during process runs. The dielectric delivery machine is used to deliver gaseous materials such as oxygen, chlorine and sulfur. The controller board is used to control the application of voltages, currents and temperatures during process runs. Finally, the waver assembly is used to transport wafers between different process tools. The environmental chamber of the tool is used to control and maintain the characteristics of the wafers during process runs. It can be heated or cooled and the temperature can be adjustable in a range of 1-35 degrees Celsius. The humidity of the chamber can also be regulated and it can be used to store a variety of different materials. The substrate heating module of TOKYO ELECTRON Expedius is used to quickly warm up substrates during process runs. It also has a temperature control asset which can regulate the temperature in a range of 10-1000 degrees Celsius. Another key feature of this module is its ability to quickly heat up and cool down in a very short period of time. Expedius is a reliable wet station with a range of features designed for semiconductor chip manufacturers. Its features enable manufacturers to carry out efficient and accurate wet processes with minimal effort and improved product quality. The model's modular design and automated process tools provide users with an effective solution to chip manufacturing needs.