Used TEL / TOKYO ELECTRON Expedius+ #293594359 for sale

TEL / TOKYO ELECTRON Expedius+ is a wet station specifically designed for chemical processes for semiconductor manufacturing. This wet station features a submerged pyro-etch oven, bath controller, and etch gas distribution panel that allow it to perform wet etching, ashing, and strip processes. The pyro-etch oven is designed to safely etch substrates with a range of corrosive chemicals. It uses high and low temperature operation, automatically adjusting the temperature using catalytic five zone reaction chamber temperature control. The catalytic five zone reaction chamber is ideal for controlling and quickly changing between different gas contents in the etch chamber, and it is capable of up to five stages of etch rate control. The bath controller is a user-friendly, automated controller that enables operations in the etch chamber to be carried out with only minimal manual intervention, and it also protects the pyro-etch oven from thermal and oxygen deficits. The bath controller has quick-response baths and can store up to 115 recipes, and its safe material handling mechanisms ensure the highest product quality and safety. The integrated etch gas distribution panel within the wet station allows for efficient and secure delivery of high-purity rare gases. It features multiple gas control valves, with the option to work with both liquid and vapor gas delivery. The gas delivery flow is designed to strike a balance between rapid uptake of etch reaction and minimizing thermal stress. The panel also features automated container exhaust and leak testing capabilities that guarantee safe and secure handling of gases. TEL Expedius+ wet station has an intuitive user interface that ensures easy operation and monitoring. It allows users to view alarm and operation statuses, with a user-friendly graphic display and a wide range of sensor input signals. It also supports Data management and CMMS (Computerized Maintenance Management System) synchronization, providing easy traceability to all processes. Overall, TOKYO ELECTRON Expedius+ wet station offers reliable and efficient chemical processing capabilities. With its robust and user-friendly design, it is suitable for industrial semiconductor manufacturing and other high-precision chemical processes.