Used TEL / TOKYO ELECTRON Expedius #293629289 for sale

TEL / TOKYO ELECTRON Expedius is a wet station designed for advanced semiconductor processing. It offers a range of processes for a variety of applications. Its advanced features include: High-speed, high-accuracy processing using inert gas, liquid chemicals, and atmospheric chemical agents. Ability to process wafers of all sizes, from small to large. Multiple process modules to perform different processes at the same time. Processes that can be precisely controlled, including the flow rate, temperature, and the duration of the reaction. Compatibility with multiple types of instruments and process controllers. Automation features to simplify and speed up the processing. A powerful graphical user interface to allow users to monitor and control the processes in real time. TEL Expedius includes several components that are important to the operation of the system. The first is the central processing unit (CPU), which provides the control software and the communications between the control system and the different process modules. The second is the Liquid Handler, which is the system that handles the flow and dispersion of the liquid chemicals used in the process. The third is the Substrate Handler, which controls the loading, unloading, and alignment of the wafers on the substrate carriers. Finally, the fourth is the Process Controllers, which are responsible for controlling the parameters, such as the flow rate, temperature, and other pre-exposure parameters. TOKYO ELECTRON Expedius is designed for high-precision processing of wafers using a variety of chemical agents. It also supports many different types of instruments and process controllers, allowing for great flexibility in the design of the process. The automation features also enhance the efficiency of the processing. The graphical user interface makes monitoring and controlling the process easy, and allows users to start, stop, and pause the processing at any time. It also allows users to program different sequences of processes, and switch between them quickly. Expedius is a great choice for advanced semiconductor processing.