Used TEL / TOKYO ELECTRON Expedius+ #293629293 for sale

TEL / TOKYO ELECTRON Expedius+ is an advanced wet station which provides an all-in-one solution for the precise control of high complexity process applications. The wet station combines precise low-pressure chemical vapor deposition (LPCVD), chemical-mechanical polishing (CMP) and precision wet-processing capabilities. The unit can handle work pieces up to 200 mm (in diameter) and 16 mm in thickness, ensuring a high degree of precision and repeatability. The wet station is equipped with a vacuum chamber, designed and built with superior quality materials to ensure highest performance and reliability. The specially designed chamber enables accurate control of the CMP process, resulting in precise etching, high-level surface flatness, smoothness and homogeneity. It also enables superior precision control of the CMP operation, maximizing both the quality and productivity of the process. The wet station also features a combination of chemical and plating processes to accurately control the uniformity of all surface features. The CMP and LPCVD processes are precisely monitored and managed during the entire process, ensuring uniformity and repeatability of the product. The wet station also supports dry process applications, offering advanced dry etching capabilities. The integrated, high-speed spindles provide greater control and increased productivity during the mechanical processes of polishing, grinding and archiving. On-screen graphics display the results of all processes in operation, with the ability to review past operations and settings for further optimization. The station is equipped with a range of sensors including pressure, temperature, humidity and liquid level, giving accurate feedback to the operator. TEL Expedius+ provides a reliable and consistent environment to ensure optimal precision and repeatability during chemical, mechanical and wet processing processes. Features like the low-pressure chamber, integrated spindles and efficient control system enable the unit to increase product quality and yield, while reducing costs. This multifunctional wet station is ideal for the precise control of high complexity process applications.