Used TEL / TOKYO ELECTRON Expedius #293629295 for sale
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TEL / TOKYO ELECTRON Expedius is a wet station for cleaning, stripping, etching, drying, and finishes of wafers on an industrial setting. The wet station is equipped with a state-of-the-art micro-processing tool station internal chamber, known as a process tank. The process tank is made up of a series of interconnected compartments, with each compartment designed to perform a specific function. The wet station is also equipped with an array of supporting fixtures and utilities, such as a wet-process station, spin rinse dryer (SRD), a solution temperature temperature, and more. The wet station's process tank is designed in a modular fashion, allowing it to be tailored to specific operational requirements. The process tank is outfitted with multiple security valves, which are designed to shut off the compartments and prevent hazardous or dangerous materials from entering the station. The process tank meets ISO 9001 regulations, and includes safety features such as an external pressure purge, automated chemical management equipment, and an exhaust system. The wet-processing station is one of the key pieces of equipment within the wet station. This provides ultra-fast, ultra-clean processing for the wafers, making it the ideal tool for rapidly cleaning, stripping, etching, drying and finishing of all sorts of wafers. This wet-processing station is highly reliable, utilizing a completely automated unit, featuring temperature, time and pressure control, as well as an advanced chemical solution management machine. The spin rinse dryer (SRD) is a crucial component within the wet station. It quickly dries wafers in an automated fashion, enabling users to quickly move on to the next stage without having to worry about waiting times due to drying processes. The SRD is able to dry wafers in an incredibly efficient manner, significantly reducing energy consumption. The SRD is incredibly accurate, with the capacity to measure temperature, pressure and solution concentration with a high degree of accuracy. A solution temperature temperature (STT) is also a key part of the wet station. This unit accurately monitors and controls the temperature of any solution within the process tank, making sure that it is never too high or too low for the particular process. The STT also ensures that the temperature remains constant throughout the entire process, meaning wafers can be consistently worked on, enabling predictable and repeatable results. Lastly, the wet station is equipped with a range of additional utilities and fixtures, such as a tank cover, cover lifter, liquid level monitor, sprinkler, tank venting tool, waste treatment asset, tank blockage detection model, suction systems, and air re-circulation systems. Each of these provide optimum support for the processing tank, ensuring reliability and safety. In summary, TEL Expedius is a wet station which excels in its ability to clean, strip, etch, dry and finish wafers in an industrial setting. This wet station is equipped with the highest quality components and systems, including a process tank, wet-processing station, spin rinse dryer, solution temperature temperature, and a range of additional fixtures and utilities. This wet station is incredibly reliable and efficient, enabling users to complete processes in a fraction of the time.
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