Used TEL / TOKYO ELECTRON Expedius #293633732 for sale

ID: 293633732
Vintage: 2005
Wet bench 2005 vintage.
TEL / TOKYO ELECTRON Expedius is a wet station designed for automated cleaning, processing, chemical process control, and control of wafer throughput. This innovative technology boasts a range of features, including user-friendly operation, high speed processing, and advanced process control capabilities. TEL Expedius utilizes an Auto-CAD (Computer Aided Design) equipment for the design of custom configurations for various processing applications. The system allows for the set up of the wet station with multiple configurations for different processes. This allows for more efficient processing injection, where users can set different parameters tailored to the process being run on the wet station. TOKYO ELECTRON Expedius is capable of simultaneous solution processing and is able to run multiple processes at once. This features allows users to perform wafer cleaning and other processing operations much faster than conventional wet stations. Additionally, the unit includes process monitoring and control features. It can monitor the temperature, flow rate, pressure, and other parameters of all components of the wet station. This feature, combined with the automated process control offered by the software, gives users the ability to easily and accurately control the processing environment. Expedius utilizes a fully automated process for all chemistries, including acids, bases, organic solvents, and catalyst from wafer cleaning processes to post etching/absorption baths. This automation makes the machine significantly faster than manual systems and eliminates the possibility for user error. Additionally, the tool uses sensors and controllers to ensure accuracy and repeatability during the process. TEL / TOKYO ELECTRON Expedius is designed with environmental considerations in mind. This wet station is equipped with an exhaust asset that allows for the removal of any hazardous or toxic fumes and particles generated during processing. The model also includes a water drainage equipment, which ensures all liquid waste is disposed of safely while still protecting the environment. Overall, TEL Expedius is a reliable and efficient wet station. It promotes high precision, fast operation, and automated process control. By utilizing this wet station, users are able to greatly reduce processing time and labor costs, while creating products of the highest possible quality.
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