Used TEL / TOKYO ELECTRON Expedius #293633733 for sale

TEL / TOKYO ELECTRON Expedius is a wet station designed for use in semiconductor device fabrication procedures. It is an ideal combination of wet processing and lithography tools, leading to the highest process throughput, improved yields and reliability, and the highest quality results. The station consists of a spin processor, a complex ion implanter, and a vapor delivery system. The spin processor allows for up to 20 stations of automated spin-coating to provide uniform layer deposition. The ion implanter deposits ions at high energy to control the charge in each focused beam. The vapor delivery system allows higher rate of gas flow which is important in efficiently carrying out CVD, PVD and etching applications. TEL Expedius also provides leading-edge technology in creating optimum micro-environments within the station. A vacuum chamber with integrated computer-controlled active cooling helps prevent contamination from atmospheric moisture. An ozone destruction system and chemical trap prevents ozone from reaching workpieces. A process chamber with programmable temperature and humidity control maintains the most consistent chemical environments in which to perform successful wet processes. The station also comes with advanced fault detection and automatic shut-off functions for improved safety. The fault detection is especially helpful in identifying any shifts in process parameters and eliminates process flaw resulting from such shifts. The automatic shut-off reduces time spent on cleaning up any spillage or other accidents. TOKYO ELECTRON Expedius also allows for its users to customize the station to their own needs. Its modular nature allows the addition or removal of certain components so that users may fit their process parameters exactly. The station can also be integrated with other semi-automated or automated systems such as load ports making it easier to transfer and monitor wafers, tracks, or other substrates. Overall, Expedius increases efficiencies and improves yields by simplifying and automating tedious wet processes. It allows its users to customize the station to their own needs and integrates with other systems for increased workflow. Additionally, advanced safety features make sure that processes are monitored and trouble-free, allowing for uninterrupted production.