Used TEL / TOKYO ELECTRON Expedius+ #293745373 for sale

TEL / TOKYO ELECTRON Expedius+ is an advanced wafer processing equipment that features high-quality, reliable uniformity and low-maintenance cleaning protocols. Its advanced and comprehensive feature set allow for a wide variety of applications, from leading-edge semiconductor production to R&D and prototyping. At the core of TEL Expedius+ is a wet station housed in a slim-layout frame. This wet station is ideal for a wide variety of processes, including strip and cleaning, deposition, etching, surface treatment, and doping. Additionally, the wet station boasts a precise scanning auto-positioning system for accurate and repeatable processing. The wet station is also capable of a wide range of process chamber configurations, from a one-equip single-port model to a fully integrated multi-port unit. Depending on the model, the unit can accommodate up to twelve substrates at once, allowing for more efficient wafer production and higher throughput. In addition to the roomy wet station and multi-port configuration, TOKYO ELECTRON Expedius+ also features a range of advanced technologies, including wafer-to-wafer cross-wafer measurements, sub-chamber exhaust, cassette-to-cassette transfer for increased substrate compatibility, and integrated top-load measurement machine. All of these features are designed to ensure proper wafer and substrate handling, provide superior process control, and even achieve repeatable self-alignment for wafer planarity across different runs. In addition to the impressive array of features and amenities, Expedius+ also boasts a durable, self-cleaning design. Its groundbreaking ArF self-cleaning mechanism helps maintain good wafer and substrate quality with minimal manual intervention, while the Auto ATC tool helps reduce manual touching and thus minimizes the risk of contamination. Overall, TEL / TOKYO ELECTRON Expedius+ is a high-performance and efficient wafer processing asset, boasting superior uniformity, extensive process capabilities, and advanced features. With its impressive capabilities, the model is an excellent choice for wafer processing needs, from R&D and prototyping to large-scale production.