Used TEL / TOKYO ELECTRON Expedius+ #293757163 for sale
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ID: 293757163
Wafer Size: 12"
Vintage: 2007
Wet bench, 12"
Process flow: CHCL-CWS-SD2-SD2-HQDR-SC1(MS)-HQDR-SC1(MS)-HQDR-SPM
2007 vintage.
TEL / TOKYO ELECTRON Expedius is a wet station developed for semiconductor device fabrication. The wet station provides a precise environment for deposition and etching of etch components on substrates in order to produce n-channel MOSFETs, pMOSFETs and other semiconductor devices. TEL Expedius consists of a process chamber, a process controller, a gas delivery equipment, a wafer feeder, and a robot arm. The process chamber is an enclosed box designed to control the environment during deposition and etching. It includes an inlet for the introduction of process gas and a pressure resistant lid to maintain a constant pressure within the chamber. The robot arm is equipped with an advanced visual guidance system which can accurately locate and position substrates in the chamber. The gas delivery unit allows the deposition and etching to be carried out at a highly accurate rate. The process controller is responsible for the overall control of the deposition and etching process. It consists of a temperature controller, a gas meter, an automatic transfer machine, and a digital control tool. The temperature controller is used to maintain a constant temperature within the chamber to protect the sensitive components from thermal damage. The gas meter measures the rate of deposition and etching, which helps to ensure an even finish on the substrate. The automatic transfer asset is used to transport wafers in a controlled manner from the substrate holder to the process chamber and back. The wafer feeder is responsible for the introduction of substrates into the process chamber. It consists of a conveyor model and an automatic sensor equipment which detect the correct placement of the substrates before they are transferred into the chamber. Once in the chamber, the substrates undergo the deposition and etching processes, which are monitored by the gas meter and digital control system. TOKYO ELECTRON Expedius is a high-precision wet station used in the fabrication of semiconductor device components. It provides a consistent environment for deposition and etching of etch components, in order to produce n-channel MOSFETs, pMOSFETs and other semiconductor devices. The robust process controller and reliable gas delivery unit ensure that the deposition and etching processes are accurate and efficient. The wafer feeder and robot arm also provide a smooth and efficient transition between the various stages of the fabrication process.
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