Used TEL / TOKYO ELECTRON Expedius #293757165 for sale
URL successfully copied!
Tap to zoom
ID: 293757165
Wafer Size: 12"
Vintage: 2006
Wet bench, 12"
Process flow: CHCL-CWS-SD2(HF)-SD2(HF)-OF-LAL(HF17%)-HQDR-SC1-HQDR-SPM
2006 vintage.
TEL / TOKYO ELECTRON Expedius is a type of wet bench station specifically designed for semiconductor fabrication. It is intended for use in a semiconductor cleanroom environment, where precise and reliable environmental control is required for the optimal protection of sensitive cassettes and wafer carrier boats from particulate contamination. The wet station is equipped with precise and reliable electro-mechanical clusters and offers precise temperature, pressure and speed control which ensures precise alignment, cleanliness and reliability. The station also incorporates a Wet Cleaning Station (WCS) that provides a safe, controlled and uniformed environment for the cleaning and drying of wafers. The WCS utilizes organic alkaline cleaners to precisely control the cleaning and drying procedures, while the built-in Dry Fill Module ensures optimal drying of the wafers. The integrated high-pressure cleaning station further eliminates particle contamination by up to 3% in a single procedure, while providing exact and balanced temperature settings to guarantee consistent and consistent wafer processing. TEL Expedius wet station also includes a Graining Oven-Etcher and Photoresist Treatment module that offers automated, efficient and consistent processing of masks, resists and other processing agent. This module offers precise temperature and pressure settings for the fine etching process, and is also equipped with multiple internal testing systems. The etching and photoresist treatment module allows for the precise uniformity of etching solution on the wafer surface for consistently high quality results. The integrated Micro-Gas Injector further prevents wafer surface contamination during process steps, through the precise injection of specialized volatile organic substances. The station also offers automated, accurate and predetermined contaminator limits, ensuring maximum efficiency and reliability. Additionally, it provides a precision digital gas injector controller and a gas distribution system for consistent performance. Lastly, TOKYO ELECTRON Expedius wet station is equipped with a Wafer Acquisition Station (WAS) which is designed to securely transfer samples or devices with minimal contamination at ultra-low temperatures. WAS incorporates a locking mechanism and an ultra-low temperature (ULT) temperature-controller that allows process temperature to remain accurately regulated below -25 °C. In conclusion, Expedius wet station offers users an efficient, reliable and accurate method of cleaning, etching and treating wafers. Its sophisticated design provides users with an all-in-one method for semiconductor device processing in a cleanroom environment, and its integrated modules for contamination prevention, temperature and pressure control ensure consistent performance.
There are no reviews yet