Used TEL / TOKYO ELECTRON Expedius+ #293829704 for sale

TEL / TOKYO ELECTRON Expedius+ is a wet process equipment that combines the latest in advanced spray techniques with advanced automation and robotic handling from TEL. It is a sophisticated wet station that achieves industry-leading cleaning, deposition, etching and passivation processes to create highly efficient product structures. The core of the system is the advanced MicroMist technology, which uses a high-speed nozzle to create fine, uniform droplets for optimum process control. This digital nozzle provides up to 800 nozzles per row with better than 0.5 um accuracy, enabling accurate control of spray characteristics under real-time process monitoring. The unit allows precise delivery of any specified liquid, including chemicals, gases and volatile liquids. TEL Expedius+ also integrates an integrated, intelligent robot arm into its process platform, providing for precise automation. This robotic arm, known as the TriCluster, can be custom-configured for all types of process needs and is programmed independently of the control software. This provides total flexibility and control over the entire process from positioning, orientation and motion control. In addition to the automated features, TOKYO ELECTRON Expedius+ also offers advanced wafer handling and control of wafer positions, cleaning and loading arms, and superior wafer surface quality and uniformity. The superior wafer handling and alignment features enable a high-precision placement of circuit patterns on wafers. Improved cleaning and passivation techniques are integrated into the machine as well as an extensive suite of process monitoring and control for improved process monitoring and repeatability. Expedius+ provides customers with cutting-edge techniques in wafer processing, such as precise, industrial-grade wafer cleaning, deposition, and etching processes. The combination of advanced automation, robotic handling, digital nozzle-scrubbing, and advanced wafer handling provides customers with unprecedented control over their processes and superior results.