Used TEL / TOKYO ELECTRON Expedius #9098649 for sale

TEL / TOKYO ELECTRON Expedius is a wet station designed for the microlithographic process. It is an automated, all-in-one wet station designed to reduce the time required for a variety of wet processing steps used in semiconductor device manufacturing. TEL Expedius Wet Station comes with a variety of features, such as intuitive graphical user interface, process recipes, improved user control, process monitoring, data logging, and more. TOKYO ELECTRON Expedius is a modular system, featuring up to three individual process modules, including dip tanks, spinners, and dryers. Each module is independently controlled and monitored to optimize the process performance. The dip tanks are designed with high speed agitation to ensure homogeneous chemical process treatment. The spinners provide equal and consistent spinning speed and dispensing rate to achieve uniform results over different wafer sizes. The dryers have adjustable vacuum and temperature settings to ensure accurate drying. Expedius' intuitive graphical user interface (GUI) enables users to create and modify process recipes. The process recipes provide precise parameter control and allow the user to quickly set up new targets without any additional programming effort. The GUI also provides data logging and post-process analysis tools to document and monitor the process performance. TEL / TOKYO ELECTRON Expedius Wet Station's advanced process monitoring capabilities include real-time monitoring of key process parameters, such as temperature, humidity, and solution concentration. By monitoring these parameters, users can quickly identify potential process issues and make corrective actions to maintain the consistency of the microlithography results. TEL Expedius is an ideal solution for organizations seeking to reduce the time and cost of microlithography processing. It provides a user-friendly and efficient solution that results in consistent, high-quality results. With its expansive range of features, easy-to-use graphical user interface, and advanced process monitoring, TOKYO ELECTRON Expedius is a must-have for any microlithography lab.