Used TEL / TOKYO ELECTRON Expedius+ #9098650 for sale

TEL / TOKYO ELECTRON Expedius+ is a wet station featuring the latest innovations in automated wafer cleaning technology. It is a single-chamber tool for cleaning wafers efficiently with ultrapure water. TEL Expedius+ has advanced features such as a patented Waterfall Recline Flush technology which spongs, rinsing, and drying processes are completed in one chamber. This greatly reduces maintenance requirements and ensures consistent cleaning performance. The innovative self-cleaning feature also reduces downtime and process contamination. The advanced wafer cleaning system has been designed to provide wafer cleaning processes with high throughput and high cleanliness. Utilizing the patented Waterfall Recline Flush feature, TOKYO ELECTRON Expedius+ is able to achieve high-level cleaning performance by optimizing the flow of the cleaning fluid and heating wafers uniformly. In addition, the integrated Motor-driven Turntable ensures uniform agitation and uniform heating, which results in enhanced cleaning performance. Furthermore, the built-in Pre-clean Treatment System improves the surface quality produced during cleaning, providing a consistent base for subsequent films and resists. Expedius+ is also designed to reduce contamination and minimize process steps. The wafer cleaning process is automated and carefully monitored to ensure consistently clean parts. The automated processes can be preset with desired parameters, including the number of cycles and time. Furthermore, the built-in degasification system removes atmospheric contaminants, providing excellent thermal insulation which further reduces process steps by removing the need for manual degassing of the chamber. TEL / TOKYO ELECTRON Expedius+ is an ideal choice for customers who require advanced wafer cleaning performance. It provides consistent cleaning performance, efficient wafer cleaning processes, and long-lasting reliability due to the minimal maintenance requirements that make it the best choice for high-level wafer cleaning. With its combination of fast speeds and reliable performance, TEL Expedius+ will ensure that your wafers are rapidly and effectively cleaned to meet the highest levels of cleanliness.