Used TEL / TOKYO ELECTRON Expedius #9190110 for sale

TEL / TOKYO ELECTRON Expedius is a wet station designed for multiple wafer fabrication processes such as photolithography, etching, thin film, and physical vapor deposition. Designed for small to medium scale productions, the wet station is ideal for processing a variety of substrates such as glass, aluminum, and silicon. It features a multi-bay design with up to three process chambers, and includes a process gas cabinet and wafer transfer equipment. The wafer transfer system uses serialized carriers for safe and reliable transport of the wafer. TEL Expedius wet station is equipped with an advanced temperature control unit that maintains wafer temperature within a prescribed window. Process parameters such as temperature, pressure, and time can be adjusted from one single common user interface. A number of process recipes can be saved to the station's memory, allowing users to easily recall each recipe. With a precise Quartz crystal sensor, automatic process pressure calibration is possible, resulting in highly reproducible process results. TOKYO ELECTRON Expedius wet station is designed with total process coverage in mind. Its safety/environmental functions include a flexible sputtering chamber door, automatic chemical flow rate suppliers, and chamber evacuation. An advanced chemical management machine is also available. To facilitate efficient and safe operations, Expedius wet station offers several features. A Combi-Head robot tool provides low probability of particle contamination during wafer transfer. A built-in particle monitor and particle containment asset prevents particles from reaching the sensitive areas of the wafer. The wet station also features industrial-grade robotics, automated manual nozzle systems, flexible wafer handlers, and efficient robot control software. For superior process monitoring capabilities, TEL / TOKYO ELECTRON Expedius wet station includes an integrated laser measurement model that monitors multiple parameters in the processing chambers. Data loggers, sensors, and an integrated reporting equipment are also part of the package. These features together provide complete, real-time process control and efficient process debugging. In conclusion, TEL Expedius comprises of a host of advanced features that ensure reliable and reproducible results. With its comprehensive safety/environmental functions and process monitoring capabilities, it offers one of the best wet station solutions on the market.