Used TEL / TOKYO ELECTRON Expedius #9192012 for sale

TEL / TOKYO ELECTRON Expedius is a wet processing station used to fabricate semiconductor devices. The platform is a comprehensive equipment for post-lithography processes, from surface cleaning to dry etching. It features a wide range of process technologies and high-accuracy systems. TEL Expedius station consists of a base unit, a single-wafer cassette loader, and an interconnect system. The base unit is a semi-automated platform containing a range of process areas, from manual etching and cleaning areas, to automated deposition, etching, cleaning, and surface preparation stages. The single-wafer cassette loader is the primary input-output carrier. It is a vacuum wafer transfer unit that can safely transport wafers, while also providing quick wafer lids and receptor lids to protect the wafers from exposure to the environment. The interconnect machine allows for the transfer of wafers between process areas, as well as between process modules within TOKYO ELECTRON Expedius. Expedius wet station is equipped with wet etching modules and plasma etching modules. The wet etching modules have been developed to provide high etch rates while maintaining critical etch quality and uniformity. The plasma etching modules can be used for high-aspect ratio etchings, like contact-etches. The station is capable of managing etchant gas delivery and chemical delivery systems, which ensures consistent process results and minimal environmental impact. It is also equipped with an automated post-etch cleaning tool, which effectively cleans wafer surfaces after etch processes. TEL / TOKYO ELECTRON Expedius station also includes a precision mechanical metrology aisle and an atmospheric metrology aisle. The mechanical metrology aisle is a high-accuracy asset used to measure the dimensions and positions of various structures on the semiconductor device surface. The atmospheric metrology aisle is used to monitor and measure the properties of atmospheric gases in the immediate working area. Finally, the renewable wafer transport model simplifies wafer transfer between process areas and allows for the protection of the wafer surfaces from environmental influences during processing. The equipment automatically detects wafer types and transports the wafers between process areas, allowing the station to meet the needs of a wide range of wafer sizes. Overall, TEL Expedius is a comprehensive wet station system for fabricating sophisticated semiconductor devices that satisfies the requirements of the most demanding customers. It provides a wide range of process technologies and accurate systems, while also maintaining a high level of safety for its operators.