Used TEL / TOKYO ELECTRON Expedius #9209422 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Expedius is a wet semiconductor station manufactured by Japanese company TEL / TOKYO ELECTRON to provide a range of processes for the fabrication of silicon-based circuits. It is used for deposition, diffusion, and lithography to quickly create electronic components for the semiconductor industry. TEL Expedius station is an automated wet-etching and chemical mechanical planarization chemistry station and comprises of multiple chambers, including an etch chamber, a diffusion furnace, a lithography track, as well as being interfaced to a central controller. The etch chamber is equipped with a high-voltage generator to enable isobaric etching of selected areas of the substrate wafer. In addition, the chamber utilizes a two-stage gas delivery system, chemical etching agent spray, and ozone generator to make the process uniform and highly efficient. The diffusion furnace is capable of performing high-temperature processing up to 1100⁰C in a nitrogen atmosphere, to allow for the deposition of dopants such as phosphorus and boron into the silicon layer of the wafer. This process creates gate structures that promote improved current flow. The lithography track allows for the development of patterns in the wafers with high-resolution image projection. A beam of electrons is used to generate interference patterns in the wafers to create the desired features. The lithography track can also be used for exposing the wafer to ultraviolet light to create waveguides for the electronic components to pass current. The lithography track is interfaced to a number of peripheral systems such as the scanning electron microscope, mask writer, and electron microscope laser lithography systems. TOKYO ELECTRON Expedius station is designed to provide a high throughput solution to the semiconductor industry. It is highly automated, cost-effective, and allows manufacturers to quickly create electronic components. In summary, Expedius is a systematically integrated wet station that comprises of chambers for etching, diffusion, and lithography. It is capable of performing isobaric etching and diffusion processes, as well as developing patterns on the wafers with precise resolution. The station is highly automated and cost-effective, enabling manufacturers to quickly fabricate electronic components.