Used TEL / TOKYO ELECTRON Expedius #9219044 for sale

TEL/TOKYOV ELECTRON TEL / TOKYO ELECTRON Expedius is a wet station that enables fast and accurate device processing. The wet station is a process equipment for single-wafer processing and cleaning using chemical liquids, and features high-precision delivery and control of chemicals, short process times, and low particle counts. TEL Expedius wet station is composed of a chemical liquid delivery unit, control unit, spinner mechanism, and pneumatic robot. The chemical delivery unit consists of a chemical bulk delivery pipeline, in which chemicals are transported from the chemical tanks to the processing tank, a chemical transport tube that carries the chemicals from the processing tank to the process object, and a control valve, which controls the delivery of chemicals. The control unit is responsible for controlling and monitoring the chemical delivery, allowing the operator to set parameters and adjust the system settings. The spinner mechanism holds the wafer during surface processing and enables accurate contact between the wafer and the chemicals. The pneumatic robot is tasked with removing the wafer from the spinner and placing it onto the inclined table. TOKYO ELECTRON Expedius wet station is designed for the production of modern semiconductor devices. The station has been tested and certified to be highly reliable and efficient, and the components are designed to provide long-term operation with minimal maintenance. The wet station is also equipped with various features such as a real-time feedback unit and a process report printing machine that enable operators to monitor the tool performance. Additionally, the station also includes various safety features such as a gas detector and temperature and humidity control. To ensure maximum performance, Expedius is equipped with a variety of tools and sensors. The station is equipped with large oversized blower units and chemical injectors to ensure the precision chemical liquid delivery, and to ensure the precise control of chemical delivery asset parameters are set in advance. The station is also equipped with a variety of sensors, which detect and monitor various environmental aspects such as temperature, pressure, humidity, particle concentration, and liquid levels in order to keep the quality of process high. Furthermore, the station is equipped with advanced data logging and analytical software, which enables operators to analyze and monitor the operation logs in order to identify and correct operational issues in a timely manner. Overall, TEL / TOKYO ELECTRON Expedius wet station is an advanced and reliable model that enables accurate processing and cleaning of semiconductor device components. The equipment is highly precise, efficient, and reliable, and its advanced features ensure it provides a high-quality product for a wide range of production needs.