Used TEL / TOKYO ELECTRON Expedius #9351446 for sale

TEL / TOKYO ELECTRON Expedius is a wet process station, designed for semiconductor fabrication and industry applications. This wet process station is ideal for generating high-quality lithography results, including ultraviolet (UV) exposure, chemical deposition, wet etching, and other liquid-based processes. This station features a fully automated equipment with integrated controls, a self-diagnosing fault detection, a one-step chemical supply system, and other advanced automated technologies. TEL Expedius consists of a water-based process chamber featuring rapid response liquid processing, a showerhead delivery unit for the chamber process, and a sophisticated automatic cleanser machine. This operation tool enables the station to perform a wide variety of processes, allowing for faster production rates and better quality parts. The integrated controls housed in TOKYO ELECTRON Expedius have an advanced computer-based protocol that provides intuitive operation and management of all processes within the station. This program guides the operator in each step, from set-up to operation. It includes access to advanced automation, as well as preset values for each step, meaning that settings can be stored in the asset and quickly adjusted as necessary for specific purposes. This wet station offers high-performance with a relatively low cost. Its superior temperature control makes it suitable for a variety of substrates, and its high speed enables the station to complete long processes in a shorter amount of time. This station is equipped with a top-loading cassette loader and an at-source chemical injector with a patented dispersion mechanism. The cassette loader can hold up to eight active cassettes and provides quick loading and unloading while the at-source chemical injector can precisely control the amount of chemical required for each substrate. Expedius is suitable for a variety of technologies, including photolithography, wet etching, CMP, and micro-fabrication. It also offers an optional photoresist strip cycle with integrated detection and removal of photoresist and other post-processing steps, allowing for faster cycle times and higher volume production. The station also features a bubble detection model to identify and eject bubbles from the liquid supply, ensuring a consistent and high-quality result. This wet station is designed for process consistency, precision, and repeatability. TEL / TOKYO ELECTRON Expedius is suitable for many industries, from consumer electronics to medical device and aerospace components. Its robust frame, advanced features, and automated technologies make it a reliable tool for maintaining efficient production workflow and quality control.