Used TEL / TOKYO ELECTRON Expedius #9353550 for sale

TEL / TOKYO ELECTRON Expedius
ID: 9353550
Wafer Size: 12"
Vintage: 2006
Wet bench, 12" Process: SPMC PR-Strip Load / Unload module: Transfer module: Tank SD2 (Dryer): Guide material: PCTFE Process bath material: PTFE Cold DIW: 40-60 l/min POU (M/S): Guide material: QUARTZ Process bath material: PTFE Temperature: 65°C Mixing ratio: HF:H2O, 1:500 / 1:1000 Megasonic: SSDM 2800 W Cold DIW: 40-60 l/min Hot DIW: 40-60 l/min Heater HF-960M Concentration monitor SC1 (M/S): Guide material: QUARTZ Process bath material: PTFE Temperature: 35°C Mixing ratio: NH3OH:H2O2:H2O Megasonic: SSDM 2800 W IWAKI FW-40-T Pump AIH-124QS CS Heater with WJ TRCXATEB1K Filter, 0.02 µm HORIBA CS-131-0510 Concentration monitor HQDR: Guide material: PCTFE Process bath material: PTFE Temperature: 65°C Cold DIW: 40-60 l/min Hot DIW: 40-60 l/min SPTRVXATE4SM: Guide material: QUARTZ Process bath material: QUARTZ Temperature: 110°C Mixing ratio: H2S04:H2O, 5:1 Cold CIW: 40-60 l/min NSPH-55KML Pump COOLNICS AIH-64QS Heater (2) LDFHTIGPK16E72-K7 Filters, 0.2 µm HORIBA CS-150 Concentration monitor 2006 vintage.
TEL / TOKYO ELECTRON Expedius is a wet station, a type of semiconductor device fabrication equipment used in semiconductor processing. It is capable of handling multiple processes, such as chemical vapor deposition (CVD), electro-chemical deposition (ECD), physical vapor deposition (PVD), and others. It is primarily used for the production of integrated circuit (IC) chips. The wet station is designed to meet the demands of advanced semiconductor technologies and features a range of options to meet the various needs of the production process. The core system for the wet station is composed of a processor, a controller, and a Human-Machine Interface (HMI) that allow the operator to manually control the process steps. The processor and controller are responsible for controlling the various parameters that govern the process and making adjustments to the different parameters during the process. This includes setting up the correct temperature and pressure values to ensure the uniformity of the process across the entire wafer. The HMI enables the operator to set up the process enviroment and run the required processes. In addition to the processor and controller, the wet station features various cleaning systems to remove unwanted contaminants that can affect the processability and performance of the IC chips. These systems are designed with a specific purpose in mind and can include the use of filtered gases, special solvents, aerosols, and other cleaning agents. For process control, TEL Expedius utilizes a variety of metrology equipment. These include optical inspection tools, a gas atomizer, and various type of profile measurement tools. The metrology equipment is used for measuring the process results, such as the pattern characteristics and the thickness of the layers. This information is then used to adjust the process parameters, if necessary, in order to achieve the desired results. TOKYO ELECTRON Expedius comes with a number of safety features, such as fire detection, temperature and pressure sensors, and air flow sensors. All of these measures are designed to provide a safe and secure working environment for the operator. Expedius is a powerful and reliable wet station. It is capable of producing high-quality IC chips with precise process control. The range of process options and metrology equipment enable the operator to produce a uniform and precise output. The safety features ensure a safe working environment for the operator, while the device itself offers robust and reliable performance for efficient IC chip production.
There are no reviews yet