Used TEL / TOKYO ELECTRON UW-200Z #9278993 for sale
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ID: 9278993
Wafer Size: 8"
Vintage: 2005
Batch wafer processor, 8"
Dry-in / Dry-out
Install type: Thru-The-Wall (TTW)
Automated load / Unload
Bath:
1: Citric
2: POU (Point Of Use, configurable)
3: SD2 (HF / IPA Dry)
Typical process flow: Citric -> POU (QDR) ->SD2
Includes:
Fire suppression system
UPS For computer only (installed on tool)
UPS For full system (stand-alone unit)
2005 vintage.
TEL / TOKYO ELECTRON UW-200Z is a wet station that is popular among semiconductor manufacturers, due to its high degree of automation. As a wet station, it is designed to be used for the chemical etching process, which is a process used to remove material from a semiconductor wafer. TEL UW200Z is a full-scale wet station designed to accommodate multiple wafers in a single process. Its unique design features a stationary mainframe on a moving platform, allowing the wet station to quickly move between stations to process multiple wafers at once. This allows for a higher degree of automation, reducing the amount of manual intervention needed for the chemical etching process. TOKYO ELECTRON UW 200 Z has an app-based interface that can be configured for automated movement between stations. The app can also be loaded with recipes that can be used to determine the exact process parameters needed for the chemical etching procedure. The station can be operated by a single user, and can provide up to four process tanks at any one time. The wet station features the latest in safety technology, including an alarm equipment, rotary locks, and a mustering system. The mustering unit allows users to get an audible notification when the station is about to reach its end point. Also, the station features a ventilation machine, in order to prevent chemical vapours from dissipating. UW 200 Z is a reliable wet station with an impressive processing speed. It can process up to four wafers within a single batch, and can be set to repeat batches continuously for continuous production. The station is powered by an AC100V to 220V power source, and designed to be used in a clean room environment. Overall, TEL UW 200 Z is a reliable wet station that is perfect for automated chemical etching of multiple wafers. Its advanced features, including automated movement, app-controlled interface, and safety features, make it an excellent choice for manufacturing of semiconductor products.
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