Used TEL / TOKYO ELECTRON UW-300 #9098651 for sale

TEL / TOKYO ELECTRON UW-300 wet station is a reliable and economical equipment designed for semiconductor wet processing. TEL UW-300 is capable of accurately and quickly processing small substrates up to 150 mm in size on its 150 mm cassettes. The system provides excellent process repeatability and yields through a combination of its high throughput, accurate temperature and motion control, as well as its optimized features for managing small substrates. TOKYO ELECTRON UW-300 features large chamber capacity with a high efficiency recycling unit for chemical usage. This is especially useful for wet processes that require extreme temperatures or unique chemical baths. With a modular architecture, the machine can be tailored to support a variety of wet processes, such as precision etching, wet cleaning, chemical deposition, and electroplating. The tool integrates a cassette-handling unit to automate the loading and unloading of cassettes. This capability helps streamline the entire process, reducing contamination and improving yield. Additionally, a fluid central control asset enables precise temperature and flow control. This is critical for achieving stable process output. UW-300 is capable of precise process control. It provides precise temperature control using resistance-heating elements and a Far Infrared (Femto-IR) temperature sensor. It also incorporates a precise gas source-deionized (SDI) Control model for managing precise gas flow. The equipment also offers precise timing control, as well as precise motion control for precise delivery of ingredients. TEL / TOKYO ELECTRON UW-300 features a unique automated monitor system for measuring chamber settings, ambient and substrate temperature, and time-stamp information to produce process logs and recipes that are readily available for review, testing and process optimization. The unit also includes an onboard data logging machine for collecting operational parameters during processing to improve process control and reduce troubleshooting time. This tool helps maximize yields and productivity. Overall, TEL UW-300 wet station offers consistent, repeatable wet processing for small substrates up to 150 mm in size. Its high throughput, precise temperature and motion control, and excellent features for managing small substrates result in reliable yields and optimized process throughput. TOKYO ELECTRON UW-300 is a reliable and economical asset designed to help optimize wet processing.