Used TEL / TOKYO ELECTRON UW-300Z #293821721 for sale

TEL / TOKYO ELECTRON UW-300Z
ID: 293821721
Vintage: 2002
Wet station Options: SPM/APM 2002 vintage.
TEL / TOKYO ELECTRON UW-300Z is a fully automated wet bench station designed for wafer processing. It is a high precision, high productivity, and fully automated wet etching solutions station with a top efficiency. It is capable of processing wafers up to 300 mm in diameter with unbeatable speed and accuracy. This wet station is used for the etching of diverse materials such as silicon, gallium arsenide, silicon germanium, aluminum nitride, and sapphire. TEL UW300Z features a modular design, allowing the loading/unloading, storage and transfer of wafers without human intervention, minimizing potential contamination or damage. It also offers an open architecture, facilitating the integration into existing production systems sparingly. The equipment is designed to store wafers before processing, allowing more throughput and automation. The intuitive control panel provides operational information, a self-diagnostic system, and real-time process monitoring capabilities. In addition, the unit is equipped with protective shields to prevent contamination or damage, filtration systems for particle and chemical mitigation, and a variety of safety interlocks to ensure the integrity of the machine and wafers. TOKYO ELECTRON UW 300Z also offers high precision, enhanced productivity, improved integration, and flexibility. It is designed to be compatible with a variety of TEL etching plans and other commercial recipes. It features open architecture software modules and a real-time process monitor which allows users to easily customize their own processes to meet their specific requirements. The station is also equipped with precision temperature and time control, high precision wafer alignment, and a built-in light source for wafer checking tool. Furthermore, TEL / TOKYO ELECTRON UW300Z can support multiple process configurations from physical/chemical wet etching, to plating and molding. Overall, TOKYO ELECTRON UW 300 Z is designed to provide unsurpassed precision and productivity. It is well-suited for wafer processing requirements of small-to-mid-scale semiconductor production requiring improved productivity, flexibility, and precision. The asset is also capable of providing superior quality etching with a high level of integration, coupled with industry standard safety measures.
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