Used TEL / TOKYO ELECTRON UW-300Z #9282761 for sale

TEL / TOKYO ELECTRON UW-300Z is a wet station designed for use in wafer fabrication processes. The unit is used primarily as a high-precision etching station, with the capability to handle up to 8inch wafers. TEL UW300Z features a turbo molecular pump capable of achieving a vacuum of 8x10-3 Pa. This vacuum capability is essential for etching processes, as it allows for very precise etching of features smaller than 1µm. TOKYO ELECTRON UW 300Z also features a 12-axis control for processing even the most complex 8inch wafer designs. It's also equipped with a hot plate for post-etch processing such as annealing and passivation. TOKYO ELECTRON UW300Z operates within a temperature range of 20°C - 200°C, producing uniform temperature at all wafer locations which is great for achieving repeatable, accurate etching results. The station also includes a fume extractor and a chemical hood, both of which help to maintain a clean and safe work environment. The unit is also equipped with a diagnostics system that provides real-time data on the system's performance. This includes information such as total etch time, gas pressure, thermal profile and more. This helps to ensure accuracy and precision as well as reduce any potential troubleshooting times. Overall, TEL / TOKYO ELECTRON UW 300Z is a high-performance wet station optimized for 8inch wafer processing. Its combination of features such as its vacuum capability, 12-axis control, temperature range and diagnostic system make it an ideal choice for any chip fabrication process. The unit ensures accuracy, repeatability and safety, making it an invaluable tool for modern wafer fabrication.