Used TEL / TOKYO ELECTRON UW-300Z #9392079 for sale
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ID: 9392079
Wafer Size: 12"
Vintage: 2004
Wet station, 12", parts machine
PC
Bath
SRM Tank
Temperature controller
Heater
Exhaust unit
2004 vintage.
TEL / TOKYO ELECTRON UW-300Z is an all-in-one wet station designed for semiconductor manufacturing processes. This multi-functional station includes a high-pressure sprayer, wet processing bath, liquid waste holding tank, transfer robot, steam dryer, and UV curing lamp. The high-pressure sprayer is critical for washing and cleaning of wafers and other components before process and finish operations. This wet station features a high-pressure range of 70 to 85 bar with a 0.8mm nozzle diameter, making it ideal for precisely cleaning delicate components without any risk of damage. It also includes a strong yet gentle sprays, allowing for efficient washing with minimal splashing or overspray. The wet processing bath is designed for various processes, such as etching, cleaning, electroplating, and scale processing. This versatile bath offers users a wide range of temperatures, ranging from 0 to 120 degrees Celsius. It also includes agitation equipment to ensure homogenous material distribution during process steps. Additionally, this bath features an optional drain feature, which allows for quick, efficient draining of the bath when cleaning. The transfer robot is designed for effective and efficient material transportation, with an Automatic Guided Vehicle (AGV)-based system and user-programmable settings. The robot offers operators a variety of operational options, such as start point settings, memory multi-path operations, and position and data restoration. Additionally, this robot features a command validation unit, which checks all commands and prevents any unintentional processes. The steam dryer, another component of the station, facilitates complete drying of samples with an extensive pre-drying time of up to eight minutes. This dryer features an effective indirect drum drying machine that provides users with an efficient and consistent drying process. The optional UV curing lamp is also included in the station to provide users with heat resistant finishes and shorten the overall process time. In conclusion, TEL UW300Z is a versatile wet station designed for the semiconductor manufacturing process. This station includes various components, such as a high-pressure sprayer, wet processing bath, transfer robot, steam dryer, and UV curing lamp, allowing users to complete all processes without the need for additional, separate equipment. The efficient and complete drying process makes this wet station ideal for semiconductor manufacturing applications.
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