Used TEL / TOKYO ELECTRON UW-8000 #9185010 for sale

TEL / TOKYO ELECTRON UW-8000
ID: 9185010
Wafer Size: 8"
Vintage: 1997
Wet Station for PR Strip, 8" 1997 vintage.
TEL / TOKYO ELECTRON UW-8000 is a wet station solution for semiconductor device fabrication. It is designed for a wide range of applications, from substrates of all sizes to a diverse set of materials, including silicon, gallium arsenide, silicon germanium, silicon-on-istors and gallium nitride-based HEMTs. TEL UW-8000 enables complex wet etch processes to be completed in a reliable and safe manner, with precision and repeatability that match exacting industry specifications. TOKYO ELECTRON UW 8000 provides up to 16 process chambers that feature an integrated cleaning equipment and high-speed agitation and filtration. This system is capable of completing up to 8 recipes with precise accuracy to optimize and control any process requirement. TOKYO ELECTRON UW-8000 is equipped with single- or dual-crystal quartz technology for the highest quality material control, which is capable of etching to within 5 nanometers. An integrated ECR (e-gun) provides low-temperature etching that helps to reduce the formation of residual metallic films. TEL / TOKYO ELECTRON UW 8000 includes a patented gas-dynamic and dielectric magnetron unit capable of minimizing gas usage, providing precision gas control with access to both an internal and external gas supply, and reducing energy costs. The automated load and unload capabilities of UW-8000 improve handling times for up to four-inch substrates. This machine features a dynamic personal computer (PC) interface to control all aspects of the process. In addition to its features, TEL UW 8000 is designed to achieve a high level of safety and stability in all conditions. UW 8000 meets all international safety standards and has been vibration tested to protect its accuracy and precision. TEL / TOKYO ELECTRON UW-8000 also provides a vast array of features for trouble-free maintenance, including self-diagnostic and monitoring capabilities, as well as a remote monitoring tool that provides real-time performance data. In short, TEL UW-8000 wet station provides a highly reliable and efficient solution for a wide range of application needs, offering precision etching with minimal gas usage and a secure connection for remote monitoring. With its dynamic features and safety protocols, TOKYO ELECTRON UW 8000 is an ideal choice for the semiconductor industry.
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