Used TEL / TOKYO ELECTRON UW-8000 #9223611 for sale

TEL / TOKYO ELECTRON UW-8000 is a wet station designed specifically for batch and single wafer processing applications. This equipment is specifically designed for wet chemistry processing like etches, thinner deposition, solvent cleaning, chemical mechanical polishing (CMP), and wet chemical treatment. TEL UW-8000 is a flexible system that can process both single wafers and batch processing of up to 200 wafers. It is equipped with two process modules which each consists of four individual process cells, all of which are isolated. As such, this unit is capable of handling both single wafer and batch processing with no need for additional accessories. The process cells feature slide open gates to enable easy access and loading/unloading for the individual wafers. The setting and control of the process recipes can be easily done using the easy to operate touchscreen display. It also comes with an intuitive recipe editor/management machine to make sure that all parameters are properly set and recorded. The built-in alarm management tool helps to ensure that wafer quality is maintained by surrounding the environment with necessary operator attention during operations. The design of the chamber also ensures a uniform wafer process everytime, while providing superior temperature and humidity control. The chamber is equipped with a multi-zone exhaust asset to control the temperature and humidity of the chamber. It also features a conformal flow technology that enables precise flow while maintaining a uniform environment. To help maintain uniformity, TOKYO ELECTRON UW 8000 model also has an in-situ contamination monitor which measures the amount of airborne particulate contamination in real time. TEL UW 8000 equipment is a unique, carefully designed system that provides consistent high-quality results every time. With its multiple process cells, simple automation unit, and alarm management machine; this tool enables accurate and repeatable wet chemistry processing in any environment.