Used TEL / TOKYO ELECTRON UW-8000 #9292570 for sale
URL successfully copied!
Tap to zoom
ID: 9292570
Wafer Size: 8"
Vintage: 2001
Wet station, 8"
Process: Post cleaner
Chemical supply unit
UPS
Exhaust blower unit
Hot DIW unit
Organic scrubber
Acid / Alkali scrubber
IPA Recycle unit
AC Power box
Position / Name / Material / Temperature control / Measuring / Pump / Filter / Chemical supply / Drain exhaust
POS11 / UL / PVC / Ionizer / - / - / - / - / Natural
POS10 / ID / Quartz / SS HEAT / - / Dip / - / - / Organic
POS09 / FR / Quartz / - / - / - / - / - / Natural
POS08 / HQDR / Quartz / Qtz heat / 2" / - / - / - / Natural
POS07 / HPM / Quartz / CS heat / 3 / Circulation / Filtering / CCSS / Acid
POS06 / OF / Quartz / - / - / - / - / - / Natural
POS05 / HQDR / Quartz / Qtz heat / 2 / - / - / - / Natural
POS04 / APM / Quartz / CS heat / 1 / Circulation / Filtering / CCSS / Alkali
POS03 / QDR / Quartz / - / - / - / - / - / Natural
POS02 / CHCL / PVC / - / - / - / - / - / Natural
POS01 / LD / PVC / Ionizer / - / - / - / - / Natural
Measuring instrument: KURABO Resistivity meter / Temperature controller / APM Concentration meter
Controller: TEL / TOKYO ELECTRONICS Board
FF-20HT Pump
MILLIPORE TAAD011G19E5H23D Filter
THE-63Q CS Heat
Fire extinguisher: Cabinex-EN
Signal tower: 4 Color (GYWR)
PATLITE LED Type
Missing parts:
IPA Vapor dryer Quartz bath
(2) Robot chucks
HPM Plate
APM Plate
Sonic generator
Power supply:
200 V, 150 A, 3 Phase
100 V, 60 A, Single phase
100 V, 5 A, Single phase
2001 vintage.
TEL / TOKYO ELECTRON UW-8000 is a versatile, intuitive wet station ideal for a variety of nanofabrication processes. It is a computer-controlled immersion ultra-high-resolution lithography tool designed for creating advanced nanoscale features that measure from 500nm to 200nm. This precision tool utilizes an intense beam of light to "etch" a complex pattern onto a very small wafer or substrate, creating microelectronic products with amazing accuracy. TEL UW-8000 is equipped with an adjustable, high-precision substrate stage that can move in the X, Y, and Z axes, with a stepper motor providing each axis with 2 micron resolution. The built-in illuminator can accommodate various light sources, and be adjusted to produce beams with wavelengths between 400 and 800nm. In addition to immersing the wafer into a resist material, TOKYO ELECTRON UW 8000 can also be used to etch or vaporize materials, as well as clean/polish substrates. The wafer is mechanically supported to minimize vibration, and the station is fully automated, allowing it to carry out a range of processes even while unattended. It is designed with a compact footprint for easy integration into a lab or clean room environment, and a small, lightweight unit for maximum application flexibility. TOKYO ELECTRON UW-8000's intuitive user interface is designed for easy operation; the graphical user interface walks the user through every step of the process. This enables users to formulate their own custom recipes and set up more intricate etching patterns. The station also features two humidity management systems designed to monitor and control relative humidity, ensuring that the wafers remain dry and contamination-free. Finally, UW 8000 is a highly reliable tool available at an affordable price, ideal for those looking to produce sophisticated nanoscale products in a modern, low-cost manner. With its ability to boost yields across a variety of processes, UW-8000 is a valuable investment for any nano fabrication laboratory.
There are no reviews yet