Used KLA / TENCOR 6420 Surfscan #9180714 for sale

KLA / TENCOR / PROMETRIX 6420 Surfscan platform is an all-in-one, high-precision wafer testing and metrology equipment for characterizing the electrical properties and topographical features of semiconductor wafers. It's designed to help improve process yield, increase process control, and ensure device performance. KLA 6420 Surfscan system is built on a modular platform, requiring a sophisticated, closed-loop, in-situ measurement unit. The instrument integrates optical metrology, non-contact electrical measurement, and wafer inspection. It produces simultaneous measurement of the electrical properties and wafer topography of up to 5 sites on a wafer. TENCOR 6420 Surfscan machine is powered by KLA InSight technology, which is an integrated metrology platform that combines scanning electron microscopy, confocal microscopy, quantitative surface metrology, and electrical measurement. This technology provides high resolution, comprehensive measurements that quantify the wafer's electrical properties and surface morphology. The tool is also capable of simultaneous measurements at multiple sites on the wafer. In-situ electrical measurement of electrical properties is obtained using the Prometric 6420 wafer module. This module is capable of non-contact, low-force in-situ electrical measurements on wafers even as small as 4 inches in diameter. This module can measure both high- and low-frequency signals across the wafer to identify electrical parameters such as charge-discharge voltage, current pathways, surface resistivity, dielectric constant, leakage, and capacitance. The optical metrology capabilities of 6420 Surfscan provide precise and accurate topographical and surface profiling on the wafer. This module uses a proprietary suite of light sources and precision optics to accurately measure surface roughness, surface texture, and wafer thickness. It is also capable of performing both high- and low-power metrology scans on both the surface and height profiles of the wafer. The integrated optical and electrical wafer inspection scans provide users with detailed data about any anomalies or defects in the wafer. The asset's visual defect analysis performs a full 270 degree automatic inspection of the wafer surface in search of any anomalies. Contaminants or defects can be identified, classified, and tracked as they move through the process. TENCOR prometric PROMETRIX 6420 Surfscan platform is a versatile wafer testing and metrology model that is capable of providing accurate and comprehensive electrical and metrology analysis. It enables manufacturers to ensure correct electrical performance and topographical features of their wafer, ultimately improving process yields and device performance.